Coplanar waveguides and butt-joints on InP

J.H. Besten, den, D. Caprioli, R. Pahuta, E. Smalbrugge, T. Vries, de, J.J.M. Kwaspen, A.W. Roodnat, R. Dijk, van, F.E. Vliet, van, X.J.M. Leijtens, M.K. Smit

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

We report about simulations and measurements on RF-interconnections on SI-InP as well as on n+-InP wafers. Coplanar waveguides (CPWs) with different metallisation thicknesses were fabricated and characterized. Propagation losses for narrow CPWs of 1.5 µm Authickness are 4 dB/cm on SI-InP at 40 GHz and for broad CPWs as low as 1 dB/cm. We tested butt-joint coupling of two different chips by cleaving a chip with CPWs, gluing both parts on a Si-wafer and bonding them to each other. Simulations of these bonded CPWs agree well with measured results.
Original languageEnglish
Title of host publicationProceedings of the 6th annual symposium of the IEEE/LEOS Benelux Chapter, 2 December 2001, Brussels, Belgium
EditorsF. Berghmans, H. Thienpont, J. Danckaert, L. Desmet
Place of PublicationBrussels, Belgium
PublisherIEEE/LEOS
Pages197-201
ISBN (Print)90-5487247-0
Publication statusPublished - 2001
Event6th Annual Symposium of the IEEE/LEOS Benelux Chapter - Brussels, Belgium
Duration: 3 Dec 20013 Dec 2001
Conference number: 6

Conference

Conference6th Annual Symposium of the IEEE/LEOS Benelux Chapter
CountryBelgium
CityBrussels
Period3/12/013/12/01

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butt joints
waveguides
International System of Units
chips
wafers
simulation
propagation

Cite this

Besten, den, J. H., Caprioli, D., Pahuta, R., Smalbrugge, E., Vries, de, T., Kwaspen, J. J. M., ... Smit, M. K. (2001). Coplanar waveguides and butt-joints on InP. In F. Berghmans, H. Thienpont, J. Danckaert, & L. Desmet (Eds.), Proceedings of the 6th annual symposium of the IEEE/LEOS Benelux Chapter, 2 December 2001, Brussels, Belgium (pp. 197-201). Brussels, Belgium: IEEE/LEOS.
Besten, den, J.H. ; Caprioli, D. ; Pahuta, R. ; Smalbrugge, E. ; Vries, de, T. ; Kwaspen, J.J.M. ; Roodnat, A.W. ; Dijk, van, R. ; Vliet, van, F.E. ; Leijtens, X.J.M. ; Smit, M.K. / Coplanar waveguides and butt-joints on InP. Proceedings of the 6th annual symposium of the IEEE/LEOS Benelux Chapter, 2 December 2001, Brussels, Belgium. editor / F. Berghmans ; H. Thienpont ; J. Danckaert ; L. Desmet. Brussels, Belgium : IEEE/LEOS, 2001. pp. 197-201
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title = "Coplanar waveguides and butt-joints on InP",
abstract = "We report about simulations and measurements on RF-interconnections on SI-InP as well as on n+-InP wafers. Coplanar waveguides (CPWs) with different metallisation thicknesses were fabricated and characterized. Propagation losses for narrow CPWs of 1.5 µm Authickness are 4 dB/cm on SI-InP at 40 GHz and for broad CPWs as low as 1 dB/cm. We tested butt-joint coupling of two different chips by cleaving a chip with CPWs, gluing both parts on a Si-wafer and bonding them to each other. Simulations of these bonded CPWs agree well with measured results.",
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year = "2001",
language = "English",
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pages = "197--201",
editor = "F. Berghmans and H. Thienpont and J. Danckaert and L. Desmet",
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Besten, den, JH, Caprioli, D, Pahuta, R, Smalbrugge, E, Vries, de, T, Kwaspen, JJM, Roodnat, AW, Dijk, van, R, Vliet, van, FE, Leijtens, XJM & Smit, MK 2001, Coplanar waveguides and butt-joints on InP. in F Berghmans, H Thienpont, J Danckaert & L Desmet (eds), Proceedings of the 6th annual symposium of the IEEE/LEOS Benelux Chapter, 2 December 2001, Brussels, Belgium. IEEE/LEOS, Brussels, Belgium, pp. 197-201, 6th Annual Symposium of the IEEE/LEOS Benelux Chapter, Brussels, Belgium, 3/12/01.

Coplanar waveguides and butt-joints on InP. / Besten, den, J.H.; Caprioli, D.; Pahuta, R.; Smalbrugge, E.; Vries, de, T.; Kwaspen, J.J.M.; Roodnat, A.W.; Dijk, van, R.; Vliet, van, F.E.; Leijtens, X.J.M.; Smit, M.K.

Proceedings of the 6th annual symposium of the IEEE/LEOS Benelux Chapter, 2 December 2001, Brussels, Belgium. ed. / F. Berghmans; H. Thienpont; J. Danckaert; L. Desmet. Brussels, Belgium : IEEE/LEOS, 2001. p. 197-201.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Coplanar waveguides and butt-joints on InP

AU - Besten, den, J.H.

AU - Caprioli, D.

AU - Pahuta, R.

AU - Smalbrugge, E.

AU - Vries, de, T.

AU - Kwaspen, J.J.M.

AU - Roodnat, A.W.

AU - Dijk, van, R.

AU - Vliet, van, F.E.

AU - Leijtens, X.J.M.

AU - Smit, M.K.

PY - 2001

Y1 - 2001

N2 - We report about simulations and measurements on RF-interconnections on SI-InP as well as on n+-InP wafers. Coplanar waveguides (CPWs) with different metallisation thicknesses were fabricated and characterized. Propagation losses for narrow CPWs of 1.5 µm Authickness are 4 dB/cm on SI-InP at 40 GHz and for broad CPWs as low as 1 dB/cm. We tested butt-joint coupling of two different chips by cleaving a chip with CPWs, gluing both parts on a Si-wafer and bonding them to each other. Simulations of these bonded CPWs agree well with measured results.

AB - We report about simulations and measurements on RF-interconnections on SI-InP as well as on n+-InP wafers. Coplanar waveguides (CPWs) with different metallisation thicknesses were fabricated and characterized. Propagation losses for narrow CPWs of 1.5 µm Authickness are 4 dB/cm on SI-InP at 40 GHz and for broad CPWs as low as 1 dB/cm. We tested butt-joint coupling of two different chips by cleaving a chip with CPWs, gluing both parts on a Si-wafer and bonding them to each other. Simulations of these bonded CPWs agree well with measured results.

M3 - Conference contribution

SN - 90-5487247-0

SP - 197

EP - 201

BT - Proceedings of the 6th annual symposium of the IEEE/LEOS Benelux Chapter, 2 December 2001, Brussels, Belgium

A2 - Berghmans, F.

A2 - Thienpont, H.

A2 - Danckaert, J.

A2 - Desmet, L.

PB - IEEE/LEOS

CY - Brussels, Belgium

ER -

Besten, den JH, Caprioli D, Pahuta R, Smalbrugge E, Vries, de T, Kwaspen JJM et al. Coplanar waveguides and butt-joints on InP. In Berghmans F, Thienpont H, Danckaert J, Desmet L, editors, Proceedings of the 6th annual symposium of the IEEE/LEOS Benelux Chapter, 2 December 2001, Brussels, Belgium. Brussels, Belgium: IEEE/LEOS. 2001. p. 197-201