Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing

V. Beladiya, T. Faraz, W.M.M. Kessels, A. Tünnermann, A. Szeghalmi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

10 Citations (Scopus)
1 Downloads (Pure)

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