| Original language | English |
|---|---|
| Title of host publication | Conference on Control Applications, Singapore |
| Publication status | Published - 2007 |
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Control of a high precision stage using a walking piezo actuator
- R.J.E. Merry
- , N.C.T. de Kleijn
- , M.J.G. Molengraft, van de
- , M. Steinbuch
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review