Control of a high precision stage using a walking piezo actuator

R.J.E. Merry, N.C.T. de Kleijn, M.J.G. Molengraft, van de, M. Steinbuch

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

8 Citations (Scopus)
Original languageEnglish
Title of host publicationConference on Control Applications, Singapore
Publication statusPublished - 2007

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