Continuum modeling of particle redeposition during ion-beam erosion. One-dimensional case

C. Diddens, S.J. Linz

Research output: Contribution to journalArticleAcademicpeer-review

Abstract

We present a detailed analysis of a laterally one-dimensional continuum model for target particle redeposition during ion-beam erosion under normal incidence. We show that the redeposition mechanism can be approximated by a Taylor expansion around the mean surface height and clarify the impact of redeposition on nano-scale patterning. Most importantly, we show that stable well-ordered periodic patterns can result in a common Kuramoto-Sivashinsky-like continuum model for ion-beam erosion in cooperation with the model for particle redeposition and identify parameter ranges where they appear. Supplementary material in the form of one mp4 file available from the Journal web page at http://dx.doi.org/10.1140/epjb/e2013-40555-7
Original languageEnglish
Pages (from-to)397
Number of pages13
JournalEuropean Physical Journal B : Condensed Matter and Complex Systems
Volume86
Issue number9
DOIs
Publication statusPublished - 1 Sep 2013
Externally publishedYes

Keywords

  • Mesoscopic and Nanoscale Systems

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