Abstract
We present a detailed analysis of a laterally one-dimensional continuum
model for target particle redeposition during ion-beam erosion under
normal incidence. We show that the redeposition mechanism can be
approximated by a Taylor expansion around the mean surface height and
clarify the impact of redeposition on nano-scale patterning. Most
importantly, we show that stable well-ordered periodic patterns can
result in a common Kuramoto-Sivashinsky-like continuum model for
ion-beam erosion in cooperation with the model for particle redeposition
and identify parameter ranges where they appear.
Supplementary material in the form of one mp4 file available from the
Journal web page at http://dx.doi.org/10.1140/epjb/e2013-40555-7
Original language | English |
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Pages (from-to) | 397 |
Number of pages | 13 |
Journal | European Physical Journal B |
Volume | 86 |
Issue number | 9 |
DOIs | |
Publication status | Published - 1 Sept 2013 |
Externally published | Yes |
Keywords
- Mesoscopic and Nanoscale Systems