Continuum measurements during the power interruption of an inductively coupled plasma

J.M. Regt, de, J. Dijk, van, J.J.A.M. Mullen, van der, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 4
EditorsJ.E. Harry
Place of Publications.l.
PublisherInternational Union of Pure and Applied Chemistry
Pages1428-1433
Publication statusPublished - 1993

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