Continuous compliance compensation of position-dependent flexible structures

N. Kontaras; M.F. Heertjes; H.J. Zwart

doi:10.1016/j.ifacol.2016.07.930

Continuous compliance compensation of position-dependent flexible structures

N. Kontaras, M.F. Heertjes, H.J. Zwart

Research output: Contribution to journal › Conference article › Academic › peer-review

4 Citations (Scopus)

4 Downloads (Pure)

Abstract

The implementation of lightweight high-performance motion systems in lithography and other applications imposes lower requirements on actuators, amplifiers, and cooling. However, the decreased stiffness of lightweight designs increases the effect of structural flexibilities especially when the point of interest is not at a fixed location. This is for example occurring when exposing a silicon wafer. The present work addresses the problem of compliance compensation in flexible structures, when the performance location is time-varying. The compliance function is derived using the frequency domain representation of the solution of the partial differential equation (PDE) describing the structure. The method is validated by simulation results.

Original language	English
Pages (from-to)	76-81
Number of pages	6
Journal	IFAC-PapersOnLine
Volume	49
Issue number	13
DOIs	https://doi.org/10.1016/j.ifacol.2016.07.930
Publication status	Published - 2016
Event	12th IFAC Workshop on Adaptation and Learning in Control and Signal Processing (ALCOSP 2016) - Eindhoven, Netherlands Duration: 29 Jun 2016 → 1 Jul 2016 Conference number: 12

Keywords

compliance compensation
Euler-Bernoulli beam
feedforward
flexible structures
partial differential equation
PDE

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10.1016/j.ifacol.2016.07.930

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Kontaras, N., Heertjes, M. F., & Zwart, H. J. (2016). Continuous compliance compensation of position-dependent flexible structures. IFAC-PapersOnLine, 49(13), 76-81. https://doi.org/10.1016/j.ifacol.2016.07.930

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