Context-rich and domain-based machine diagnostic logging analyzer

Due to the increasing complexity of ASML machines, many diagnostic tools have been developed in the Metrology department for analyzing the Machine Diagnostics Logging (MDL) in the past years. These tools suffer from similar problems, such as low extensibility and low maintainability. This report presents the design and implementation of a Domain-based MDL Analyzer tool. This tool is designed using the Onion Architecture pattern to create a domain-centric architecture, which utilizes a domain model to capture the domain concepts and their relationships. In addition, the Domain-Driven Design approach is used to design the domain model. As a result, a Domain-based MDL Analyzer prototype is delivered, including a domain model for one of the Metrology sub-functions. This prototype can be easily extended for the use in different domains. Furthermore, it demonstrates the feasibility of applying the domain-based architecture for designing diagnostics tools.