Constructive nanolithography and nanochemistry : local probe oxidation and chemical modification

D. Wouters, U.S. Schubert

Research output: Contribution to journalArticleAcademicpeer-review

40 Citations (Scopus)
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Abstract

The possibility to prepare and use submicrometer-sized patterns in successive functionalization reactions with quaternary ammonium salts and (functional) chlorosilanes, as well as cationic gold nanoparticles, is presented. Submicrometer-sized structures were prepared by local probe oxidation of octadecyl trichlorosilane functionalized silicon wafers. By this method, patterns were oxidized with 40-nm resolution, which can be used in local surface functionalization reactions. The principle of subsequent functionalization, either with additional quaternary ammonium salts or by a polymer grafting reaction, has been demonstrated.
Original languageEnglish
Pages (from-to)9033-9038
JournalLangmuir
Volume19
Issue number21
DOIs
Publication statusPublished - 2003

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