TY - JOUR
T1 - Constrained iterative feedback tuning for robust control of a wafer stage system
AU - Heertjes, M.F.
AU - Velden, van der, B.J.C.H.
AU - Oomen, T.A.E.
PY - 2016/1/1
Y1 - 2016/1/1
N2 - Iterative feedback tuning (IFT) enables the data-driven tuning of controller parameters without the explicit need for a parametric model. It is known, however, that IFT can lead to nonrobust solutions. The aim of this paper is to develop an IFT approach with robustness constraints. A constrained IFT problem is formulated that is solved by introducing a penalty function. Essentially, the gradient estimates decompose into: 1) the well-known IFT gradients and 2) the gradients with respect to this penalty function. The latter are obtained through a nonparametric model of the controlled system. This guarantees robust stability while only requiring a nonparametric model. The experimental results obtained from the motion control systems of an industrial wafer scanner confirm enhanced performance with guaranteed robustness estimates.
AB - Iterative feedback tuning (IFT) enables the data-driven tuning of controller parameters without the explicit need for a parametric model. It is known, however, that IFT can lead to nonrobust solutions. The aim of this paper is to develop an IFT approach with robustness constraints. A constrained IFT problem is formulated that is solved by introducing a penalty function. Essentially, the gradient estimates decompose into: 1) the well-known IFT gradients and 2) the gradients with respect to this penalty function. The latter are obtained through a nonparametric model of the controlled system. This guarantees robust stability while only requiring a nonparametric model. The experimental results obtained from the motion control systems of an industrial wafer scanner confirm enhanced performance with guaranteed robustness estimates.
U2 - 10.1109/TCST.2015.2418311
DO - 10.1109/TCST.2015.2418311
M3 - Article
SN - 1063-6536
VL - 24
SP - 56
EP - 66
JO - IEEE Transactions on Control Systems Technology
JF - IEEE Transactions on Control Systems Technology
IS - 1
ER -