Connecting system identification and robust control for next-generation motion control of a wafer stage

T.A.E. Oomen, R.M.A. Herpen, van, S.J. Quist, M.M.J. Wal, van de, O.H. Bosgra, M. Steinbuch

Research output: Contribution to journalArticleAcademicpeer-review

110 Citations (Scopus)
16 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Connecting system identification and robust control for next-generation motion control of a wafer stage'. Together they form a unique fingerprint.

Engineering & Materials Science