Connecting system identification and robust control for next-generation motion control of a wafer stage

T.A.E. Oomen, R.M.A. Herpen, van, S.J. Quist, M.M.J. Wal, van de, O.H. Bosgra, M. Steinbuch

Research output: Contribution to journalArticleAcademicpeer-review

91 Citations (Scopus)
6 Downloads (Pure)

Abstract

Next-generation precision motion systems are lightweight to meet stringent requirements regarding throughput and accuracy. Such lightweight systems typically exhibit lightly damped flexible dynamics in the controller cross-over region. State-of-the-art modeling and motion control design procedures do not deliver the required model complexity and fidelity to control the flexible dynamical behavior. The aim of this paper is to develop a combined system identification and robust control design procedure for high performance motion control and apply it to a wafer stage. Hereto, new connections between system identification and robust control are employed. The experimental results confirm that the proposed procedure significantly extends existing results and enables next-generation motion control design.
Original languageEnglish
Pages (from-to)102-118
Number of pages17
JournalIEEE Transactions on Control Systems Technology
Volume22
Issue number1
DOIs
Publication statusPublished - 2014

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