Conformality and the role of ions during plasma-assisted atomic layer deposition

Karsten Arts

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Kessels, W.M.M. (Erwin), Promotor Knoops, Harm C.M., Copromotor
Award date	15 Sept 2021
Place of Publication	Eindhoven
Publisher	Eindhoven University of Technology
Print ISBNs	978-90-386-5341-9
Publication status	Published - 15 Sept 2021

Proefschrift.

Access to Document

@phdthesis{e8405d309aa047e7ab2ad4d5eb24d090,

title = "Conformality and the role of ions during plasma-assisted atomic layer deposition",

author = "Karsten Arts",

note = "Proefschrift.",

year = "2021",

month = sep,

day = "15",

language = "English",

isbn = "978-90-386-5341-9",

publisher = "Eindhoven University of Technology",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}