Conformality and the role of ions during plasma-assisted atomic layer deposition

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Applied Physics
Supervisors/Advisors
  • Kessels, W.M.M. (Erwin), Promotor
  • Knoops, Harm C.M. , Copromotor
Award date15 Sep 2021
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-5341-9
Publication statusPublished - 15 Sep 2021

Bibliographical note

Proefschrift.

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