Conformality and the role of ions during plasma-assisted atomic layer deposition

Karsten Arts

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

143 Downloads (Pure)
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Applied Physics and Science Education
  • Kessels, W.M.M. (Erwin), Promotor
  • Knoops, Harm C.M., Copromotor
Award date15 Sept 2021
Place of PublicationEindhoven
Print ISBNs978-90-386-5341-9
Publication statusPublished - 15 Sept 2021

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