Concise formula for the Zernike coefficients of scaled pupils

A.J.E.M. Janssen, P. Dirksen

Research output: Contribution to journalArticleAcademicpeer-review

38 Citations (Scopus)


Modern steppers and scanners have a projection lens whose numerical aperture (NA) can be varied so as to optimize the image performance for certain lithographic features. Thus a variable fraction of the aberrations is actually involved in the imaging process. In this letter, we present a concise formula for the NA scaling of the Zernike coefficients. In addition, we apply our results to the Strehl ratio.
Original languageEnglish
Pages (from-to)030501-1/3
Number of pages3
JournalJournal of Microlithography, Microfabrication and Microsystems
Issue number3
Publication statusPublished - 2006


Dive into the research topics of 'Concise formula for the Zernike coefficients of scaled pupils'. Together they form a unique fingerprint.

Cite this