Concise formula for the Zernike coefficients of scaled pupils

A.J.E.M. Janssen, P. Dirksen

Research output: Contribution to journalArticleAcademicpeer-review

32 Citations (Scopus)

Abstract

Modern steppers and scanners have a projection lens whose numerical aperture (NA) can be varied so as to optimize the image performance for certain lithographic features. Thus a variable fraction of the aberrations is actually involved in the imaging process. In this letter, we present a concise formula for the NA scaling of the Zernike coefficients. In addition, we apply our results to the Strehl ratio.
Original languageEnglish
Pages (from-to)030501-1/3
Number of pages3
JournalJournal of Microlithography, Microfabrication and Microsystems
Volume5
Issue number3
DOIs
Publication statusPublished - 2006

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