Computing aberration coefficients for plane-symmetric reflective systems: A Lie algebraic approach

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Abstract

We apply the Lie algebraic method to reflecting optical systems with plane-symmetric freeform mirrors. Using analytical ray-tracing equations, we construct an optical map. The expansion of this map gives us the aberration coefficients in terms of initial ray coordinates. The Lie algebraic method is applied to treat aberrations up to arbitrary order. The presented method provides a systematic and rigorous approach to the derivation, treatment, and composition of aberrations in plane-symmetric systems. We give the results for second- and third-order aberrations and apply them to three single-mirror examples.

Original languageEnglish
Pages (from-to)1215-1224
Number of pages10
JournalJournal of the Optical Society of America A, Optics, Image Science and Vision
Volume40
Issue number6
DOIs
Publication statusPublished - 1 Jun 2023

Funding

Topconsortium voor Kennis en Innovatie (\u201CPhotolitho MCS\u201D (TKI-HTSM 19.0162)). The authors thank Teus Tukker (ASML) for his fruitful remarks.

FundersFunder number
Topconsortium voor Kennis en InnovatieTKI-HTSM 19.0162

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