Computational modeling of direct print microlithography

A.A. Darhuber, S.M. Miller, S.M. Troian, S. Wagner

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review


    Using a combination of experiment and simulations, we have studied the equilibrium shapes of liquid microstructures on flat but chemically heterogeneous substrates. The surface patterns, which define regions of different surface energy, induce deformations of the liquid-solid contact line, which in turn can either promote or impede capillary break-up and bulge formation. We study numerically the influence of the adhesion energies on the hydrophilic and hydrophobic surface areas, the pattern geometry and the deposited fluid volume on the liquid surface profiles.
    Original languageEnglish
    Title of host publicationMaterials development for direct write technologies : symposium held April 24-26, 2000, San Francisco, California, U.S.A.
    EditorsDouglas B. Chrisey
    Place of PublicationWarrendale
    PublisherMaterials Research Society
    ISBN (Print)1-55899-532-3
    Publication statusPublished - 2000

    Publication series

    NameMaterials Research Society symposium proceedings


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