In this paper we present a language that models an important aspect of ASML waferscanners, called coordination. The language is a compositional subset of UML2.0 activity diagrams which by themselves are not compositional in our sense of the word. We show how we transform models in this language into models for the ASML platform that implements coordination. The fact that the language is compositional enables us to define the transformation in a simple and compact manner.
|Title of host publication||Model-Driven Engineering Languages and Systems (Proceedings 9th International Conference, MoDELS 2006, Genova, Italy, October 1-6, 2006)|
|Editors||O. Nierstrasz, J. Whittle, D. Harel, G. Reggio|
|Place of Publication||Berlin|
|Publication status||Published - 2006|
|Name||Lecture Notes in Computer Science|