@inproceedings{e068472026264208a7880c66d496345d,
title = "Compositional and structural analysis of Al-doped ZnO multilayers by LEAP",
author = "A.D. Giddings and Y. Wu and M.A. Verheijen and T.J. Prosa and F. Roozeboom and D.J. Larson and W.M.M. Kessels",
year = "2014",
doi = "10.1017/S1431927614004358",
language = "English",
series = "Microscopy and Microanalysis",
number = "suppl. 3",
pages = "526--527",
booktitle = "The 2014 Microscopy & Microanalysis meeting in Hartford, CT, USA, August 3-7, 2014",
}