Components of continuum radiation in an inductively coupled plasma

J.M. Regt, de, J. Dijk, van, J.J.A.M. Mullen, van der, D.C. Schram

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Measurements of the continuum emission of an inductively coupled plasma in argon have been carried out. The mechanisms responsible for this radiation show different electron-density-dependences. By interrupting the power that is followed by a decay of the electron density, it is possible to unravel these different mechanisms. From the measurements it is concluded that the electron-atom interactions are in general of equal importance to the electron-ion interactions in creating continuum radiation. The relative contribution of the electron-atom interactions depends on the conditions of the plasma. Furthermore, the measurements show that the cross section for electron-atom momentum transfer deduced from our experiment using the formula for electron-atom free-free continuum radiation is not in agreement with the literature.
Original languageEnglish
Pages (from-to)40-46
JournalJournal of Physics D: Applied Physics
Issue number1
Publication statusPublished - 1995


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