Compensation of the anisotropic behavior of single crystalline silicon in a 3D tactile sensor

E.J.C. Bos, R.W.P. Heldens, F.L.M. Delbressine, P.H.J. Schellekens, A.H. Dietzel

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Abstract

Single crystalline silicon is often used as a base material for micro electromechanical systems (MEMS). A disadvantage from a mechanical point of view is its anisotropic mechanical behavior. A suspension with deformable structures in different crystallographic orientations therefore leads to an unfavorable anisotropic mechanical behavior of the device. To create an isotropic suspension stiffness, the design is limited to deformable structures in equivalent crystallographic orientations, which limits the design possibilities. This paper presents a method to compensate for the anisotropic mechanical properties of silicon by adjusting the dimensions of the mechanical suspension. The method is investigated by the example of a 3D tactile sensor, developed at the Eindhoven University of Technology. Using experimental results and Finite Element Analysis it is shown that an isotropic stiffness can be obtained. As a result, the measurement range and uncertainty of the sensor within this range are improved by a factor of 4. The method is applicable to all systems with an anisotropic mechanical behavior of its material.
Original languageEnglish
Pages (from-to)374-381
JournalSensors and Actuators, A: Physical
Volume134
Issue number2
DOIs
Publication statusPublished - 2007

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Silicon
Suspensions
Stiffness
Crystalline materials
stiffness
Sensors
silicon
MEMS
rangefinding
Finite element method
Mechanical properties
microelectromechanical systems
adjusting
mechanical properties
sensors
Compensation and Redress
Uncertainty

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Bos, E.J.C. ; Heldens, R.W.P. ; Delbressine, F.L.M. ; Schellekens, P.H.J. ; Dietzel, A.H. / Compensation of the anisotropic behavior of single crystalline silicon in a 3D tactile sensor. In: Sensors and Actuators, A: Physical. 2007 ; Vol. 134, No. 2. pp. 374-381.
@article{9ce8145878b74780a6d682c7bf27344b,
title = "Compensation of the anisotropic behavior of single crystalline silicon in a 3D tactile sensor",
abstract = "Single crystalline silicon is often used as a base material for micro electromechanical systems (MEMS). A disadvantage from a mechanical point of view is its anisotropic mechanical behavior. A suspension with deformable structures in different crystallographic orientations therefore leads to an unfavorable anisotropic mechanical behavior of the device. To create an isotropic suspension stiffness, the design is limited to deformable structures in equivalent crystallographic orientations, which limits the design possibilities. This paper presents a method to compensate for the anisotropic mechanical properties of silicon by adjusting the dimensions of the mechanical suspension. The method is investigated by the example of a 3D tactile sensor, developed at the Eindhoven University of Technology. Using experimental results and Finite Element Analysis it is shown that an isotropic stiffness can be obtained. As a result, the measurement range and uncertainty of the sensor within this range are improved by a factor of 4. The method is applicable to all systems with an anisotropic mechanical behavior of its material.",
author = "E.J.C. Bos and R.W.P. Heldens and F.L.M. Delbressine and P.H.J. Schellekens and A.H. Dietzel",
year = "2007",
doi = "10.1016/j.sna.2006.05.043",
language = "English",
volume = "134",
pages = "374--381",
journal = "Sensors and Actuators, A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "2",

}

Compensation of the anisotropic behavior of single crystalline silicon in a 3D tactile sensor. / Bos, E.J.C.; Heldens, R.W.P.; Delbressine, F.L.M.; Schellekens, P.H.J.; Dietzel, A.H.

In: Sensors and Actuators, A: Physical, Vol. 134, No. 2, 2007, p. 374-381.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Compensation of the anisotropic behavior of single crystalline silicon in a 3D tactile sensor

AU - Bos, E.J.C.

AU - Heldens, R.W.P.

AU - Delbressine, F.L.M.

AU - Schellekens, P.H.J.

AU - Dietzel, A.H.

PY - 2007

Y1 - 2007

N2 - Single crystalline silicon is often used as a base material for micro electromechanical systems (MEMS). A disadvantage from a mechanical point of view is its anisotropic mechanical behavior. A suspension with deformable structures in different crystallographic orientations therefore leads to an unfavorable anisotropic mechanical behavior of the device. To create an isotropic suspension stiffness, the design is limited to deformable structures in equivalent crystallographic orientations, which limits the design possibilities. This paper presents a method to compensate for the anisotropic mechanical properties of silicon by adjusting the dimensions of the mechanical suspension. The method is investigated by the example of a 3D tactile sensor, developed at the Eindhoven University of Technology. Using experimental results and Finite Element Analysis it is shown that an isotropic stiffness can be obtained. As a result, the measurement range and uncertainty of the sensor within this range are improved by a factor of 4. The method is applicable to all systems with an anisotropic mechanical behavior of its material.

AB - Single crystalline silicon is often used as a base material for micro electromechanical systems (MEMS). A disadvantage from a mechanical point of view is its anisotropic mechanical behavior. A suspension with deformable structures in different crystallographic orientations therefore leads to an unfavorable anisotropic mechanical behavior of the device. To create an isotropic suspension stiffness, the design is limited to deformable structures in equivalent crystallographic orientations, which limits the design possibilities. This paper presents a method to compensate for the anisotropic mechanical properties of silicon by adjusting the dimensions of the mechanical suspension. The method is investigated by the example of a 3D tactile sensor, developed at the Eindhoven University of Technology. Using experimental results and Finite Element Analysis it is shown that an isotropic stiffness can be obtained. As a result, the measurement range and uncertainty of the sensor within this range are improved by a factor of 4. The method is applicable to all systems with an anisotropic mechanical behavior of its material.

U2 - 10.1016/j.sna.2006.05.043

DO - 10.1016/j.sna.2006.05.043

M3 - Article

VL - 134

SP - 374

EP - 381

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

SN - 0924-4247

IS - 2

ER -