Abstract
| Original language | English |
|---|---|
| Pages (from-to) | 374-381 |
| Journal | Sensors and Actuators, A: Physical |
| Volume | 134 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2007 |
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Compensation of the anisotropic behavior of single crystalline silicon in a 3D tactile sensor. / Bos, E.J.C.; Heldens, R.W.P.; Delbressine, F.L.M.; Schellekens, P.H.J.; Dietzel, A.H.
In: Sensors and Actuators, A: Physical, Vol. 134, No. 2, 2007, p. 374-381.Research output: Contribution to journal › Article › Academic › peer-review
TY - JOUR
T1 - Compensation of the anisotropic behavior of single crystalline silicon in a 3D tactile sensor
AU - Bos, E.J.C.
AU - Heldens, R.W.P.
AU - Delbressine, F.L.M.
AU - Schellekens, P.H.J.
AU - Dietzel, A.H.
PY - 2007
Y1 - 2007
N2 - Single crystalline silicon is often used as a base material for micro electromechanical systems (MEMS). A disadvantage from a mechanical point of view is its anisotropic mechanical behavior. A suspension with deformable structures in different crystallographic orientations therefore leads to an unfavorable anisotropic mechanical behavior of the device. To create an isotropic suspension stiffness, the design is limited to deformable structures in equivalent crystallographic orientations, which limits the design possibilities. This paper presents a method to compensate for the anisotropic mechanical properties of silicon by adjusting the dimensions of the mechanical suspension. The method is investigated by the example of a 3D tactile sensor, developed at the Eindhoven University of Technology. Using experimental results and Finite Element Analysis it is shown that an isotropic stiffness can be obtained. As a result, the measurement range and uncertainty of the sensor within this range are improved by a factor of 4. The method is applicable to all systems with an anisotropic mechanical behavior of its material.
AB - Single crystalline silicon is often used as a base material for micro electromechanical systems (MEMS). A disadvantage from a mechanical point of view is its anisotropic mechanical behavior. A suspension with deformable structures in different crystallographic orientations therefore leads to an unfavorable anisotropic mechanical behavior of the device. To create an isotropic suspension stiffness, the design is limited to deformable structures in equivalent crystallographic orientations, which limits the design possibilities. This paper presents a method to compensate for the anisotropic mechanical properties of silicon by adjusting the dimensions of the mechanical suspension. The method is investigated by the example of a 3D tactile sensor, developed at the Eindhoven University of Technology. Using experimental results and Finite Element Analysis it is shown that an isotropic stiffness can be obtained. As a result, the measurement range and uncertainty of the sensor within this range are improved by a factor of 4. The method is applicable to all systems with an anisotropic mechanical behavior of its material.
U2 - 10.1016/j.sna.2006.05.043
DO - 10.1016/j.sna.2006.05.043
M3 - Article
VL - 134
SP - 374
EP - 381
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
SN - 0924-4247
IS - 2
ER -