Compensating quasi-static disturbances for inferential control: an observer-based approach applied to a wafer stage

N.F.M. Mooren; R.J. Voorhoeve; N.J. Dirkx; Tom Oomen

Compensating quasi-static disturbances for inferential control: an observer-based approach applied to a wafer stage

N.F.M. Mooren, R.J. Voorhoeve, N.J. Dirkx, Tom Oomen

Control Systems Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

83 Downloads (Pure)

Original language	English
Title of host publication	Proceedings of the IEEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018)
Place of Publication	Tokyo, Japan
Pages	1-2
Publication status	Published - 2018
Event	4th IEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018) - Tokyo Denki University, Tokyo, Japan Duration: 6 Mar 2018 → 8 Mar 2018 Conference number: 4 http://www2.iee.or.jp/~diic/samcon/

Conference

Conference	4th IEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018)
Abbreviated title	SAMCON 2018
Country/Territory	Japan
City	Tokyo
Period	6/03/18 → 8/03/18
Internet address	http://www2.iee.or.jp/~diic/samcon/

Access to Document

MoorenDirVooOom2018

Cite this

@inproceedings{0b3d9b3bdecd4360a9f7046835460108,

title = "Compensating quasi-static disturbances for inferential control: an observer-based approach applied to a wafer stage",

author = "N.F.M. Mooren and R.J. Voorhoeve and N.J. Dirkx and Tom Oomen",

year = "2018",

language = "English",

pages = "1--2",

booktitle = "Proceedings of the IEEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018)",

note = "4th IEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018), SAMCON 2018 ; Conference date: 06-03-2018 Through 08-03-2018",

url = "http://www2.iee.or.jp/~diic/samcon/",

}

Mooren, NFM, Voorhoeve, RJ, Dirkx, NJ & Oomen, T 2018, Compensating quasi-static disturbances for inferential control: an observer-based approach applied to a wafer stage. in Proceedings of the IEEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018)., V2-4, Tokyo, Japan, pp. 1-2, 4th IEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018), Tokyo, Japan, 6/03/18.

Compensating quasi-static disturbances for inferential control: an observer-based approach applied to a wafer stage. / Mooren, N.F.M.; Voorhoeve, R.J.; Dirkx, N.J. et al.
Proceedings of the IEEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018). Tokyo, Japan, 2018. p. 1-2 V2-4.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Compensating quasi-static disturbances for inferential control: an observer-based approach applied to a wafer stage

AU - Mooren, N.F.M.

AU - Voorhoeve, R.J.

AU - Dirkx, N.J.

AU - Oomen, Tom

N1 - Conference code: 4

PY - 2018

Y1 - 2018

M3 - Conference contribution

SP - 1

EP - 2

BT - Proceedings of the IEEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018)

CY - Tokyo, Japan

T2 - 4th IEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018)

Y2 - 6 March 2018 through 8 March 2018

ER -