Compensating quasi-static disturbances for inferential control: an observer-based approach applied to a wafer stage

N.F.M. Mooren, R.J. Voorhoeve, N.J. Dirkx, Tom Oomen

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Original languageEnglish
Title of host publicationProceedings of the IEEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018)
Place of PublicationTokyo, Japan
Pages1-2
Publication statusPublished - 2018
Event4th IEEJ international workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018) - Tokyo Denki University, Tokyo, Japan
Duration: 6 Mar 20188 Mar 2018
Conference number: 4
http://www2.iee.or.jp/~diic/samcon/

Conference

Conference4th IEEJ international workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018)
Abbreviated titleSAMCON 2018
CountryJapan
CityTokyo
Period6/03/188/03/18
Internet address

Cite this

Mooren, N. F. M., Voorhoeve, R. J., Dirkx, N. J., & Oomen, T. (2018). Compensating quasi-static disturbances for inferential control: an observer-based approach applied to a wafer stage. In Proceedings of the IEEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018) (pp. 1-2). [V2-4].