Compensating quasi-static disturbances for inferential control: an observer-based approach applied to a wafer stage

N.F.M. Mooren; R.J. Voorhoeve; N.J. Dirkx; Tom Oomen

Compensating quasi-static disturbances for inferential control: an observer-based approach applied to a wafer stage

N.F.M. Mooren, R.J. Voorhoeve, N.J. Dirkx, Tom Oomen

Control Systems Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Original language	English
Title of host publication	Proceedings of the IEEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018)
Place of Publication	Tokyo, Japan
Pages	1-2
Publication status	Published - 2018
Event	4th IEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018) - Tokyo Denki University, Tokyo, Japan Duration: 6 Mar 2018 → 8 Mar 2018 Conference number: 4 http://www2.iee.or.jp/~diic/samcon/

Conference

Conference	4th IEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018)
Abbreviated title	SAMCON 2018
Country/Territory	Japan
City	Tokyo
Period	6/03/18 → 8/03/18
Internet address	http://www2.iee.or.jp/~diic/samcon/

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MoorenDirVooOom2018

Cite this

@inproceedings{0b3d9b3bdecd4360a9f7046835460108,

title = "Compensating quasi-static disturbances for inferential control: an observer-based approach applied to a wafer stage",

author = "N.F.M. Mooren and R.J. Voorhoeve and N.J. Dirkx and Tom Oomen",

year = "2018",

language = "English",

pages = "1--2",

booktitle = "Proceedings of the IEEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018)",

note = "4th IEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018), SAMCON 2018 ; Conference date: 06-03-2018 Through 08-03-2018",

url = "http://www2.iee.or.jp/~diic/samcon/",

}

Mooren, NFM, Voorhoeve, RJ, Dirkx, NJ & Oomen, T 2018, Compensating quasi-static disturbances for inferential control: an observer-based approach applied to a wafer stage. in Proceedings of the IEEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018)., V2-4, Tokyo, Japan, pp. 1-2, 4th IEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018), Tokyo, Japan, 6/03/18.

Compensating quasi-static disturbances for inferential control: an observer-based approach applied to a wafer stage. / Mooren, N.F.M.; Voorhoeve, R.J.; Dirkx, N.J. et al.
Proceedings of the IEEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018). Tokyo, Japan, 2018. p. 1-2 V2-4.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Compensating quasi-static disturbances for inferential control: an observer-based approach applied to a wafer stage

AU - Mooren, N.F.M.

AU - Voorhoeve, R.J.

AU - Dirkx, N.J.

AU - Oomen, Tom

N1 - Conference code: 4

PY - 2018

Y1 - 2018

M3 - Conference contribution

SP - 1

EP - 2

BT - Proceedings of the IEEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018)

CY - Tokyo, Japan

T2 - 4th IEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018)

Y2 - 6 March 2018 through 8 March 2018

ER -