Comparing surfatron plasmas in Ar with and without SiCl4

J.F.J. Janssen, J.L.G. Suijker, J. van Dijk

Research output: Contribution to conferencePoster

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Original languageEnglish
Publication statusPublished - 15 Mar 2016
EventSymposium, Plasma Physics and Radiation Technology -
Duration: 15 Mar 201616 Mar 2016

Conference

ConferenceSymposium, Plasma Physics and Radiation Technology
Period15/03/1616/03/16

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