Common zeros in synchronization of high-precision stage systems

M. Ochoa Navarrete, M.F. Heertjes, R.H. Munnig-Schmidt

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

9 Citations (Scopus)
3 Downloads (Pure)

Abstract

In synchronization of high-precision motion systems, in particular the synchronization between a wafer stage system and a reticle stage system of a wafer scanner, a novel feedforward structure is studied. In this structure, the numerator of each plant model is described by an input shaping filter capturing the zeros of said model. The denominator is described by a feedforward filter capturing the poles. Ideally, this gives zero error tracking of both the reticle and wafer stage systems without the need for plant inversion. But in view of the different input shaping filter operations, appropriate synchronization behavior is not guaranteed. To obtain both appropriate tracking and synchronization behavior, we propose to augment the reticle stage filters with the zeros from the wafer stage plant model. Reversely, the wafer stage filters are augmented with the zeros from the reticle stage plant model. The feasibility of such an approach is confirmed by simulation results and, to some extend, by measurement results obtained from an industrial wafer scanner.
Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Mechatronics (ICM-2015), 6-8 March 2015, Nagoya, Japan
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Pages602-607
Number of pages6
ISBN (Electronic)978-1-4799-3633-5
DOIs
Publication statusPublished - 2015
Event2015 IEEE International Conference on Mechatronics, ICM 2015 - Nagoya, Japan
Duration: 6 Mar 20158 Mar 2015

Conference

Conference2015 IEEE International Conference on Mechatronics, ICM 2015
Abbreviated titleICM 2015
Country/TerritoryJapan
CityNagoya
Period6/03/158/03/15

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