TY - JOUR
T1 - Collective Thomson scattering experiments on a tin vapor discharge in the prepinch phase
AU - Kieft, E.R.
AU - Mullen, van der, J.J.A.M.
AU - Kroesen, G.M.W.
AU - Banine, V.Y.
AU - Koshelev, K.N.
PY - 2004
Y1 - 2004
N2 - Partially collective Thomson scattering measurements have been performed on a triggered vacuum arc in tin vapor, which is a candidate source of extreme ultraviolet light for application in semiconductor lithography. In this paper, results on the electron densities and temperatures are presented for the prepinch phase of the discharge. Electron densities and temperatures increase from 1*10/sup 23/ m/sup -3/ to 1*10/sup 24/ m/sup -3/ and from 5 eV to over 30 eV, respectively, in about 100 ns. The results are confirmed by Stark broadening data
AB - Partially collective Thomson scattering measurements have been performed on a triggered vacuum arc in tin vapor, which is a candidate source of extreme ultraviolet light for application in semiconductor lithography. In this paper, results on the electron densities and temperatures are presented for the prepinch phase of the discharge. Electron densities and temperatures increase from 1*10/sup 23/ m/sup -3/ to 1*10/sup 24/ m/sup -3/ and from 5 eV to over 30 eV, respectively, in about 100 ns. The results are confirmed by Stark broadening data
U2 - 10.1103/PhysRevE.70.056413
DO - 10.1103/PhysRevE.70.056413
M3 - Article
C2 - 15600771
SN - 1539-3755
VL - 70
SP - 056413-1/7
JO - Physical Review E - Statistical, Nonlinear, and Soft Matter Physics
JF - Physical Review E - Statistical, Nonlinear, and Soft Matter Physics
IS - 5
M1 - 056413
ER -