Coatings, and methods and devices for the manufacture thereof

G.R. Alcott; J.L. Linden; M. Creatore; M.C.M. Sanden, van de

Coatings, and methods and devices for the manufacture thereof

G.R. Alcott (Inventor), J.L. Linden (Inventor), M. Creatore (Inventor), M.C.M. Sanden, van de (Inventor)

Research output: Patent › Patent publication

Abstract

The present invention describes a method for manufg. a low dielec. const. coating, which coating comprises an inorg. and an org. component, wherein precursors for these components are activated in at least two plasma sources for plasma activated deposition of a chem. vapor phase and wherein said activated precursors are combined before they are deposited from the chem. vapor phase on the substrate to form the coating, characterized in that said inorg. component comprises porous nanoparticles. The invention also describes a device for the manuf. of a low dielec. const. coating.

Original language	English
Patent number	EP1586674
Publication status	Published - 19 Oct 2005

Cite this

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title = "Coatings, and methods and devices for the manufacture thereof",

abstract = "The present invention describes a method for manufg. a low dielec. const. coating, which coating comprises an inorg. and an org. component, wherein precursors for these components are activated in at least two plasma sources for plasma activated deposition of a chem. vapor phase and wherein said activated precursors are combined before they are deposited from the chem. vapor phase on the substrate to form the coating, characterized in that said inorg. component comprises porous nanoparticles. The invention also describes a device for the manuf. of a low dielec. const. coating.",

author = "G.R. Alcott and J.L. Linden and M. Creatore and {Sanden, van de}, M.C.M.",

year = "2005",

month = oct,

day = "19",

language = "English",

type = "Patent",

note = "EP1586674",

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TY - PAT

T1 - Coatings, and methods and devices for the manufacture thereof

AU - Alcott, G.R.

AU - Linden, J.L.

AU - Creatore, M.

AU - Sanden, van de, M.C.M.

PY - 2005/10/19

Y1 - 2005/10/19

N2 - The present invention describes a method for manufg. a low dielec. const. coating, which coating comprises an inorg. and an org. component, wherein precursors for these components are activated in at least two plasma sources for plasma activated deposition of a chem. vapor phase and wherein said activated precursors are combined before they are deposited from the chem. vapor phase on the substrate to form the coating, characterized in that said inorg. component comprises porous nanoparticles. The invention also describes a device for the manuf. of a low dielec. const. coating.

AB - The present invention describes a method for manufg. a low dielec. const. coating, which coating comprises an inorg. and an org. component, wherein precursors for these components are activated in at least two plasma sources for plasma activated deposition of a chem. vapor phase and wherein said activated precursors are combined before they are deposited from the chem. vapor phase on the substrate to form the coating, characterized in that said inorg. component comprises porous nanoparticles. The invention also describes a device for the manuf. of a low dielec. const. coating.

UR - http://ep.espacenet.com/publicationDetails/biblio?DB=ep.espacenet.com&adjacent=true&locale=nl_NL&FT=D&date=20051019&CC=EP&NR=1586674A1&KC=A1

M3 - Patent publication

M1 - EP1586674

ER -

Coatings, and methods and devices for the manufacture thereof

Abstract

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