CN radical excitation during CNx thin film deposition by RF generated plasma beam

G. Dinescu; E. Aldea; P. Boieriu; G. Musa; R.J. Severens; M.C.M. Sanden, van de; D.C. Schram

CN radical excitation during CNx thin film deposition by RF generated plasma beam

G. Dinescu, E. Aldea, P. Boieriu, G. Musa, R.J. Severens, M.C.M. Sanden, van de, D.C. Schram

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Original language	English
Title of host publication	ESCAMPIG 13 : 13th European Sectional Conference on the Atomic and Molecular Physics of Ionized Gases, Poprad, Slovakia, August 27-30, 1996 : Abstracts of invited lectures and contributed papers
Editors	Lukac, Kslnar, Skalny
Place of Publication	s.l.
Publisher	European Physical Society (EPS)
Pages	345-346
Publication status	Published - 1996

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Dinescu, G., Aldea, E., Boieriu, P., Musa, G., Severens, R. J., Sanden, van de, M. C. M., & Schram, D. C. (1996). CN radical excitation during CNx thin film deposition by RF generated plasma beam. In Lukac, Kslnar, & Skalny (Eds.), ESCAMPIG 13 : 13th European Sectional Conference on the Atomic and Molecular Physics of Ionized Gases, Poprad, Slovakia, August 27-30, 1996 : Abstracts of invited lectures and contributed papers (pp. 345-346). European Physical Society (EPS).

Dinescu, G. ; Aldea, E. ; Boieriu, P. et al. / CN radical excitation during CNx thin film deposition by RF generated plasma beam. ESCAMPIG 13 : 13th European Sectional Conference on the Atomic and Molecular Physics of Ionized Gases, Poprad, Slovakia, August 27-30, 1996 : Abstracts of invited lectures and contributed papers . editor / Lukac ; Kslnar ; Skalny. s.l. : European Physical Society (EPS), 1996. pp. 345-346

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title = "CN radical excitation during CNx thin film deposition by RF generated plasma beam",

author = "G. Dinescu and E. Aldea and P. Boieriu and G. Musa and R.J. Severens and {Sanden, van de}, M.C.M. and D.C. Schram",

year = "1996",

language = "English",

pages = "345--346",

editor = "Lukac and Kslnar and Skalny",

booktitle = "ESCAMPIG 13 : 13th European Sectional Conference on the Atomic and Molecular Physics of Ionized Gases, Poprad, Slovakia, August 27-30, 1996 : Abstracts of invited lectures and contributed papers",

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Dinescu, G, Aldea, E, Boieriu, P, Musa, G, Severens, RJ, Sanden, van de, MCM & Schram, DC 1996, CN radical excitation during CNx thin film deposition by RF generated plasma beam. in Lukac, Kslnar & Skalny (eds), ESCAMPIG 13 : 13th European Sectional Conference on the Atomic and Molecular Physics of Ionized Gases, Poprad, Slovakia, August 27-30, 1996 : Abstracts of invited lectures and contributed papers . European Physical Society (EPS), s.l., pp. 345-346.

CN radical excitation during CNx thin film deposition by RF generated plasma beam. / Dinescu, G.; Aldea, E.; Boieriu, P. et al.
ESCAMPIG 13 : 13th European Sectional Conference on the Atomic and Molecular Physics of Ionized Gases, Poprad, Slovakia, August 27-30, 1996 : Abstracts of invited lectures and contributed papers . ed. / Lukac; Kslnar; Skalny. s.l.: European Physical Society (EPS), 1996. p. 345-346.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - CN radical excitation during CNx thin film deposition by RF generated plasma beam

AU - Dinescu, G.

AU - Aldea, E.

AU - Boieriu, P.

AU - Musa, G.

AU - Severens, R.J.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1996

Y1 - 1996

M3 - Conference contribution

SP - 345

EP - 346

BT - ESCAMPIG 13 : 13th European Sectional Conference on the Atomic and Molecular Physics of Ionized Gases, Poprad, Slovakia, August 27-30, 1996 : Abstracts of invited lectures and contributed papers

A2 - Lukac,

A2 - Kslnar,

A2 - Skalny,

PB - European Physical Society (EPS)

CY - s.l.

ER -

Dinescu G, Aldea E, Boieriu P, Musa G, Severens RJ, Sanden, van de MCM et al. CN radical excitation during CNx thin film deposition by RF generated plasma beam. In Lukac, Kslnar, Skalny, editors, ESCAMPIG 13 : 13th European Sectional Conference on the Atomic and Molecular Physics of Ionized Gases, Poprad, Slovakia, August 27-30, 1996 : Abstracts of invited lectures and contributed papers . s.l.: European Physical Society (EPS). 1996. p. 345-346