Clustertool optimization through scheduling rules

B. Lemmen, E.J.J. Campen, van, H. Roede, J.E. Rooda

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    5 Citations (Scopus)

    Abstract

    Clustertools play an increasing important role in modern semiconductor fabs. These tools are complex and have a large impact on fab performance. In this paper, a structured approach is presented to give insight in the dynamic behavior of clustertools and to optimize their performance. The approach is applied to the metal area of a waferfab. Scheduling rules are defined for clustertools of this area. A dynamic simulation model is used to evaluate the rules. Experiments show that an average improvement of 8 percent on cycle time and throughput is achieved by usage of scheduling rules
    Original languageEnglish
    Title of host publicationSemiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium, October 11-13, 1999, Santa Clara, California, 1999
    Place of PublicationPiscawatay
    PublisherInstitute of Electrical and Electronics Engineers
    Pages89-92
    ISBN (Print)0-7803-5403-6
    DOIs
    Publication statusPublished - 1999

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