Clustertool optimization through scheduling rules

B. Lemmen; E.J.J. Campen, van; H. Roede; J.E. Rooda

doi:10.1109/ISSM.1999.808745

Clustertool optimization through scheduling rules

B. Lemmen, E.J.J. Campen, van, H. Roede, J.E. Rooda

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

5 Citations (Scopus)

Abstract

Clustertools play an increasing important role in modern semiconductor fabs. These tools are complex and have a large impact on fab performance. In this paper, a structured approach is presented to give insight in the dynamic behavior of clustertools and to optimize their performance. The approach is applied to the metal area of a waferfab. Scheduling rules are defined for clustertools of this area. A dynamic simulation model is used to evaluate the rules. Experiments show that an average improvement of 8 percent on cycle time and throughput is achieved by usage of scheduling rules

Original language	English
Title of host publication	Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium, October 11-13, 1999, Santa Clara, California, 1999
Place of Publication	Piscawatay
Publisher	Institute of Electrical and Electronics Engineers
Pages	89-92
ISBN (Print)	0-7803-5403-6
DOIs	https://doi.org/10.1109/ISSM.1999.808745
Publication status	Published - 1999

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10.1109/ISSM.1999.808745

Cite this

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title = "Clustertool optimization through scheduling rules",

abstract = "Clustertools play an increasing important role in modern semiconductor fabs. These tools are complex and have a large impact on fab performance. In this paper, a structured approach is presented to give insight in the dynamic behavior of clustertools and to optimize their performance. The approach is applied to the metal area of a waferfab. Scheduling rules are defined for clustertools of this area. A dynamic simulation model is used to evaluate the rules. Experiments show that an average improvement of 8 percent on cycle time and throughput is achieved by usage of scheduling rules",

author = "B. Lemmen and {Campen, van}, E.J.J. and H. Roede and J.E. Rooda",

year = "1999",

doi = "10.1109/ISSM.1999.808745",

language = "English",

isbn = "0-7803-5403-6",

pages = "89--92",

booktitle = "Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium, October 11-13, 1999, Santa Clara, California, 1999",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

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Clustertool optimization through scheduling rules. / Lemmen, B.; Campen, van, E.J.J.; Roede, H. et al.
Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium, October 11-13, 1999, Santa Clara, California, 1999. Piscawatay: Institute of Electrical and Electronics Engineers, 1999. p. 89-92.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Clustertool optimization through scheduling rules

AU - Lemmen, B.

AU - Campen, van, E.J.J.

AU - Roede, H.

AU - Rooda, J.E.

PY - 1999

Y1 - 1999

N2 - Clustertools play an increasing important role in modern semiconductor fabs. These tools are complex and have a large impact on fab performance. In this paper, a structured approach is presented to give insight in the dynamic behavior of clustertools and to optimize their performance. The approach is applied to the metal area of a waferfab. Scheduling rules are defined for clustertools of this area. A dynamic simulation model is used to evaluate the rules. Experiments show that an average improvement of 8 percent on cycle time and throughput is achieved by usage of scheduling rules

AB - Clustertools play an increasing important role in modern semiconductor fabs. These tools are complex and have a large impact on fab performance. In this paper, a structured approach is presented to give insight in the dynamic behavior of clustertools and to optimize their performance. The approach is applied to the metal area of a waferfab. Scheduling rules are defined for clustertools of this area. A dynamic simulation model is used to evaluate the rules. Experiments show that an average improvement of 8 percent on cycle time and throughput is achieved by usage of scheduling rules

U2 - 10.1109/ISSM.1999.808745

DO - 10.1109/ISSM.1999.808745

M3 - Conference contribution

SN - 0-7803-5403-6

SP - 89

EP - 92

BT - Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium, October 11-13, 1999, Santa Clara, California, 1999

PB - Institute of Electrical and Electronics Engineers

CY - Piscawatay

ER -

Clustertool optimization through scheduling rules

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