Closed-loop control of a laser assisted carbon nanotube growth process for interconnects in flexible electronics

Y.B. Burgt, van de, Y.J. Bellouard, R. Mandamparambil, A.H. Dietzel

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

A feedback control mechanism based on infrared radiation monitoring coupled with reflectivity information was developed to control the temperature of a laser assisted chemical vapor deposition process for the growth of carbon nanotube forests. An infrared laser operating at 808 nm is focused on a silicon substrate containing a 20 nm-aluminum-oxide layer and a 1.5 nm-iron catalyst layer. The growth takes place in an argon/ hydrogen/ ethylene gaseous environment. SEM and Raman spectroscopy analysis show that good controllability and reproducibility is achieved over multiple experiments.
Original languageEnglish
Title of host publicationLaser-material interactions at micro-nanoscales : 2011 MRS Spring Meeting
Pages1-6
DOIs
Publication statusPublished - 2011
EventLaser-Material Interactions at Micro/Nanoscales, April 26-29, 2011, San Francisco, CA, USA - San Francisco, CA, United States
Duration: 26 Apr 201129 Apr 2011
http://www.mrs.org/s11program-tt/

Publication series

NameMRS Online Proceedings Library
Volume1365
ISSN (Print)1946-4274

Conference

ConferenceLaser-Material Interactions at Micro/Nanoscales, April 26-29, 2011, San Francisco, CA, USA
CountryUnited States
CitySan Francisco, CA
Period26/04/1129/04/11
OtherSymposium held at the 2011 MRS Spring Meeting
Internet address

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