Chemical vapor deposition (CVD) of thin films : reactions like others

G.B.M.M. Marin

Research output: Contribution to journalArticleAcademicpeer-review

Original languageEnglish
Pages (from-to)12,15-
JournalChemie Magazine (Ghent, 1975-1992)
Volume16
Issue number6
Publication statusPublished - 1990

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