Chemical boundary layers in CVD II. Reversible reactions

M.H.J.M. Croon, de, L.J. Giling

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Abstract

In addition to irreversible reactions, which were treated in part I, reversible reactions in the gas phase have beenstudied using the concept of the chemical boundary layer. The analysis is given for the situations in which either the forwardor the back reaction is dominant. Two conceptual models for the boundary layer are used in the calculations: theblock model and the linearly varying k model. It is shown that both models lead to the same deposition rates.
Original languageEnglish
Pages (from-to)3606-3612
JournalJournal of the Electrochemical Society
Volume137
Issue number11
DOIs
Publication statusPublished - 1990

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