Chemical aspects of the co-deposition of Chromium and Aluminium in a pack process

J.A. Klostermann, G.H. Marijnissen

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationProceedings of the fourth European conference on chemical vapour deposition, May 31 - June 3, 1983, Philips Congress Centre Eindhoven, The Netherlands
EditorsJ.J. Bloem, G. Verspui
Place of PublicationEindhoven
PublisherPhilips Centre for Manufacturing Technology
Pages363-369
Publication statusPublished - 1983
Externally publishedYes

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