Charge exchange processes in low-energy He+ ion scattering from Si and Pd2Si surfaces

G.C. van Leerdam; K.M.H. Lenssen; H.H. Brongersma

doi:10.1016/0168-583X(90)90858-R

Charge exchange processes in low-energy He⁺ ion scattering from Si and Pd₂Si surfaces

G.C. van Leerdam
, K.M.H. Lenssen
, H.H. Brongersma

Applied Physics and Science Education

Research output: Contribution to journal › Article › Academic › peer-review

21 Citations (Scopus)

Abstract

The surface of Si and thin layers of Pd₂Si on Si have been studied by low-energy He⁺ ion scattering. The occurrence of the observed low-energy tails is attributed to reionization at the surface of He neutrals scattered from subsurface layers. It is shown that the tails provide valuable in-depth information.

Original language	English
Pages (from-to)	390-393
Number of pages	4
Journal	Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	45
Issue number	1-4
DOIs	https://doi.org/10.1016/0168-583X(90)90858-R
Publication status	Published - 2 Jan 1990

Bibliographical note

Funding Information:
We thank Dr. G.J. Van der Kolk and Dr. H.J. Van Daal for stimulating discussions and Mr. G.M. Wijers for technical assistance. The investigations were supported in part by the Netherlands’ Foundation of Chemical Research (SON) with financial aid from the Netherlands’ Orgtiation for the Advancement of Scientific Research (NWO).

Funding

We thank Dr. G.J. Van der Kolk and Dr. H.J. Van Daal for stimulating discussions and Mr. G.M. Wijers for technical assistance. The investigations were supported in part by the Netherlands’ Foundation of Chemical Research (SON) with financial aid from the Netherlands’ Orgtiation for the Advancement of Scientific Research (NWO).

Access to Document

10.1016/0168-583X(90)90858-R

Cite this

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title = "Charge exchange processes in low-energy He+ ion scattering from Si and Pd2Si surfaces",

abstract = "The surface of Si and thin layers of Pd2Si on Si have been studied by low-energy He+ ion scattering. The occurrence of the observed low-energy tails is attributed to reionization at the surface of He neutrals scattered from subsurface layers. It is shown that the tails provide valuable in-depth information.",

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Charge exchange processes in low-energy He⁺ ion scattering from Si and Pd₂Si surfaces. / van Leerdam, G.C.; Lenssen, K.M.H.; Brongersma, H.H.
In: Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. 45, No. 1-4, 02.01.1990, p. 390-393.

Research output: Contribution to journal › Article › Academic › peer-review

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AB - The surface of Si and thin layers of Pd2Si on Si have been studied by low-energy He+ ion scattering. The occurrence of the observed low-energy tails is attributed to reionization at the surface of He neutrals scattered from subsurface layers. It is shown that the tails provide valuable in-depth information.

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