Charge exchange processes in low-energy He+ ion scattering from Si and Pd2Si surfaces

G. C. Van Leerdam, K. M.H. Lenssen, H. H. Brongersma

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21 Citations (Scopus)


The surface of Si and thin layers of Pd2Si on Si have been studied by low-energy He+ ion scattering. The occurrence of the observed low-energy tails is attributed to reionization at the surface of He neutrals scattered from subsurface layers. It is shown that the tails provide valuable in-depth information.

Original languageEnglish
Pages (from-to)390-393
Number of pages4
JournalNuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Issue number1-4
Publication statusPublished - 2 Jan 1990

Bibliographical note

Funding Information:
We thank Dr. G.J. Van der Kolk and Dr. H.J. Van Daal for stimulating discussions and Mr. G.M. Wijers for technical assistance. The investigations were supported in part by the Netherlands’ Foundation of Chemical Research (SON) with financial aid from the Netherlands’ Orgtiation for the Advancement of Scientific Research (NWO).


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