Characterizing dusty argon-acetylene plasmas as a first step to understand dusty EUV environments

F.M.J.H. Wetering, van de, S. Nijdam, G.M.W. Kroesen

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Abstract

In extreme ultraviolet (EUV) lithography, ionic and particulate debris coming from the plasma source plays an important role. We started up a project looking at the principles of particle formation in plasmas and the interaction with EUV radiation. To this end, we study a low-pressure (10 Pa) capacitively-coupled radio-frequency (13.56 MHz) argon-acetylene plasma. In low-pressure hydrocarbon plasmas, dust particles spontaneously form under certain conditions. The whole process occurs in a matter of seconds to minutes after igniting the plasma and results in a cloud of particulates up to micrometer sizes levitating in the plasma. Several techniques are used to gain information about the plasma dynamics. Microwave cavity resonance spectroscopy is used to determine the global electron density. Mie laser scattering is used to locally determine the dust particle density. Suspended dust particles will scatter the laser light, resulting in a visible trace through the cavity, which is also imaged from below with a video camera. The electrical characteristics of the plasma (current, voltage, impedance, dissipated power) are determined using a commercially available plasma impedance monitor. All of these techniques are time resolved and are complemented with scanning and transmission electron microscopy of the grown dust particles to infer their sizes. We conclude by presenting an overview of approaches for future research predominantly aimed at the interactions in a more EUV-like environment.
Original languageEnglish
Title of host publicationPresentation at the 3rd International Workshop on the Diagnostics and Simulation of Dusty Plasmas, August 26 - 28, 2012, Kiel, Germany
Publication statusPublished - 2012
Eventconference; 3rd International Workshop on the Diagnostics and Simulation of Dusty Plasmas, Kiel, Germany, August 26 - 28, 2012; 2012-08-26; 2012-08-28 -
Duration: 26 Aug 201228 Aug 2012

Conference

Conferenceconference; 3rd International Workshop on the Diagnostics and Simulation of Dusty Plasmas, Kiel, Germany, August 26 - 28, 2012; 2012-08-26; 2012-08-28
Period26/08/1228/08/12
Other3rd International Workshop on the Diagnostics and Simulation of Dusty Plasmas, Kiel, Germany, August 26 - 28, 2012

Fingerprint

acetylene
argon
dust
particulates
low pressure
impedance
extreme ultraviolet radiation
plasma dynamics
cavities
plasma currents
debris
lasers
monitors
micrometers
radio frequencies
lithography
hydrocarbons
cameras
interactions
microwaves

Cite this

Wetering, van de, F. M. J. H., Nijdam, S., & Kroesen, G. M. W. (2012). Characterizing dusty argon-acetylene plasmas as a first step to understand dusty EUV environments. In Presentation at the 3rd International Workshop on the Diagnostics and Simulation of Dusty Plasmas, August 26 - 28, 2012, Kiel, Germany
Wetering, van de, F.M.J.H. ; Nijdam, S. ; Kroesen, G.M.W. / Characterizing dusty argon-acetylene plasmas as a first step to understand dusty EUV environments. Presentation at the 3rd International Workshop on the Diagnostics and Simulation of Dusty Plasmas, August 26 - 28, 2012, Kiel, Germany. 2012.
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title = "Characterizing dusty argon-acetylene plasmas as a first step to understand dusty EUV environments",
abstract = "In extreme ultraviolet (EUV) lithography, ionic and particulate debris coming from the plasma source plays an important role. We started up a project looking at the principles of particle formation in plasmas and the interaction with EUV radiation. To this end, we study a low-pressure (10 Pa) capacitively-coupled radio-frequency (13.56 MHz) argon-acetylene plasma. In low-pressure hydrocarbon plasmas, dust particles spontaneously form under certain conditions. The whole process occurs in a matter of seconds to minutes after igniting the plasma and results in a cloud of particulates up to micrometer sizes levitating in the plasma. Several techniques are used to gain information about the plasma dynamics. Microwave cavity resonance spectroscopy is used to determine the global electron density. Mie laser scattering is used to locally determine the dust particle density. Suspended dust particles will scatter the laser light, resulting in a visible trace through the cavity, which is also imaged from below with a video camera. The electrical characteristics of the plasma (current, voltage, impedance, dissipated power) are determined using a commercially available plasma impedance monitor. All of these techniques are time resolved and are complemented with scanning and transmission electron microscopy of the grown dust particles to infer their sizes. We conclude by presenting an overview of approaches for future research predominantly aimed at the interactions in a more EUV-like environment.",
author = "{Wetering, van de}, F.M.J.H. and S. Nijdam and G.M.W. Kroesen",
year = "2012",
language = "English",
booktitle = "Presentation at the 3rd International Workshop on the Diagnostics and Simulation of Dusty Plasmas, August 26 - 28, 2012, Kiel, Germany",

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Wetering, van de, FMJH, Nijdam, S & Kroesen, GMW 2012, Characterizing dusty argon-acetylene plasmas as a first step to understand dusty EUV environments. in Presentation at the 3rd International Workshop on the Diagnostics and Simulation of Dusty Plasmas, August 26 - 28, 2012, Kiel, Germany. conference; 3rd International Workshop on the Diagnostics and Simulation of Dusty Plasmas, Kiel, Germany, August 26 - 28, 2012; 2012-08-26; 2012-08-28, 26/08/12.

Characterizing dusty argon-acetylene plasmas as a first step to understand dusty EUV environments. / Wetering, van de, F.M.J.H.; Nijdam, S.; Kroesen, G.M.W.

Presentation at the 3rd International Workshop on the Diagnostics and Simulation of Dusty Plasmas, August 26 - 28, 2012, Kiel, Germany. 2012.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

TY - GEN

T1 - Characterizing dusty argon-acetylene plasmas as a first step to understand dusty EUV environments

AU - Wetering, van de, F.M.J.H.

AU - Nijdam, S.

AU - Kroesen, G.M.W.

PY - 2012

Y1 - 2012

N2 - In extreme ultraviolet (EUV) lithography, ionic and particulate debris coming from the plasma source plays an important role. We started up a project looking at the principles of particle formation in plasmas and the interaction with EUV radiation. To this end, we study a low-pressure (10 Pa) capacitively-coupled radio-frequency (13.56 MHz) argon-acetylene plasma. In low-pressure hydrocarbon plasmas, dust particles spontaneously form under certain conditions. The whole process occurs in a matter of seconds to minutes after igniting the plasma and results in a cloud of particulates up to micrometer sizes levitating in the plasma. Several techniques are used to gain information about the plasma dynamics. Microwave cavity resonance spectroscopy is used to determine the global electron density. Mie laser scattering is used to locally determine the dust particle density. Suspended dust particles will scatter the laser light, resulting in a visible trace through the cavity, which is also imaged from below with a video camera. The electrical characteristics of the plasma (current, voltage, impedance, dissipated power) are determined using a commercially available plasma impedance monitor. All of these techniques are time resolved and are complemented with scanning and transmission electron microscopy of the grown dust particles to infer their sizes. We conclude by presenting an overview of approaches for future research predominantly aimed at the interactions in a more EUV-like environment.

AB - In extreme ultraviolet (EUV) lithography, ionic and particulate debris coming from the plasma source plays an important role. We started up a project looking at the principles of particle formation in plasmas and the interaction with EUV radiation. To this end, we study a low-pressure (10 Pa) capacitively-coupled radio-frequency (13.56 MHz) argon-acetylene plasma. In low-pressure hydrocarbon plasmas, dust particles spontaneously form under certain conditions. The whole process occurs in a matter of seconds to minutes after igniting the plasma and results in a cloud of particulates up to micrometer sizes levitating in the plasma. Several techniques are used to gain information about the plasma dynamics. Microwave cavity resonance spectroscopy is used to determine the global electron density. Mie laser scattering is used to locally determine the dust particle density. Suspended dust particles will scatter the laser light, resulting in a visible trace through the cavity, which is also imaged from below with a video camera. The electrical characteristics of the plasma (current, voltage, impedance, dissipated power) are determined using a commercially available plasma impedance monitor. All of these techniques are time resolved and are complemented with scanning and transmission electron microscopy of the grown dust particles to infer their sizes. We conclude by presenting an overview of approaches for future research predominantly aimed at the interactions in a more EUV-like environment.

M3 - Conference contribution

BT - Presentation at the 3rd International Workshop on the Diagnostics and Simulation of Dusty Plasmas, August 26 - 28, 2012, Kiel, Germany

ER -

Wetering, van de FMJH, Nijdam S, Kroesen GMW. Characterizing dusty argon-acetylene plasmas as a first step to understand dusty EUV environments. In Presentation at the 3rd International Workshop on the Diagnostics and Simulation of Dusty Plasmas, August 26 - 28, 2012, Kiel, Germany. 2012