Characterization of strain in Si1 - xGex/Si Multilayers and superlattices grown by molecular beam epitaxy

G.F.A van de Walle, C.W. Fredriksz, A.A. van Gorkum, R.A. van den Heuvel, C.W.T. Bulle-Lieuwma, L.J. van IJzendoorn

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