## Abstract

The main contribution of this paper is the development of a new algorithm thatenables estimation of the mean effective process time t_e and the coefficientof variation c_e^2 of a multiple machine workstation from real fab data. Thealgorithm formalizes the effective process time definitions as known in theliterature. The algorithm quantifies the claims of machine capacity by lots,which include time losses due to down time, setup time, and otherirregularities. The estimated t_e and c_e^2 values can be interpreted inaccordance with the well-known G/G/m queueing relations. Some test examples aswell as an elaborate case from the semiconductor industry show the potential ofthe new effective process time algorithm for cycle time reduction programs.

Original language | English |
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Pages (from-to) | 511-520 |

Journal | IEEE Transactions on Semiconductor Manufacturing |

Volume | 16 |

Issue number | 3 |

DOIs | |

Publication status | Published - 2003 |