Characterization of MEMS microphone sensitivity and phase distributions with applications in array processing

Patrick W.A. Wijnings; Sander Stuijk; Rick Scholte; Henk Corporaal

doi:10.1109/ICASSP39728.2021.9413352

Characterization of MEMS microphone sensitivity and phase distributions with applications in array processing

Patrick W.A. Wijnings, Sander Stuijk, Rick Scholte, Henk Corporaal

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

2 Citations (Scopus)

1 Downloads (Pure)

Abstract

An array with MEMS microphones can distinguish individual noise sources in an environment through spatial filtering. Its effectiveness depends on the variations in microphone sensitivity and phase. Quantification of these variations is valuable, because it enables assessment and optimization of array performance. This is particularly important if the measurements are to be used for enforcement of noise regulations.

Nominal microphone sensitivity and phase are manufacturer-specified, but the distribution (histogram) around these values is not. Hence, this work demonstrates a free-field comparison method for measuring these variations in a batch of arrays. We also provide the histograms at 1 kHz for a sample population of 8384 Knowles SPH0641LM4H-1 MEMS microphones (131 arrays of 64 microphones). The histograms follow t-distributions, resulting in 95% confidence intervals of ±0.39dB for sensitivity and ±0.82◦ for phase. Finally, we illustrate that delay-and-sum beamforming with these microphones results in a Gumbel-distributed gain with −0.13/+0.10dB 95% confidence interval.

Original language	English
Title of host publication	2021 IEEE International Conference on Acoustics, Speech, and Signal Processing, ICASSP 2021 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers
Pages	4480-4484
Number of pages	5
ISBN (Electronic)	9781728176055
DOIs	https://doi.org/10.1109/ICASSP39728.2021.9413352
Publication status	Published - 6 Jun 2021
Event	2021 IEEE International Conference on Acoustics, Speech, and Signal Processing, ICASSP 2021 - Virtual, Virtual, Toronto, Canada Duration: 6 Jun 2021 → 11 Jun 2021 https://2021.ieeeicassp.org/

Conference

Conference	2021 IEEE International Conference on Acoustics, Speech, and Signal Processing, ICASSP 2021
Abbreviated title	ICASSP 2021
Country/Territory	Canada
City	Virtual, Toronto
Period	6/06/21 → 11/06/21
Internet address	https://2021.ieeeicassp.org/

Keywords

Microphone arrays
Calibration
Array signal processing

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10.1109/ICASSP39728.2021.9413352

Cite this

Wijnings, P. W. A., Stuijk, S., Scholte, R., & Corporaal, H. (2021). Characterization of MEMS microphone sensitivity and phase distributions with applications in array processing. In 2021 IEEE International Conference on Acoustics, Speech, and Signal Processing, ICASSP 2021 - Proceedings (pp. 4480-4484). Article 9413352 Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/ICASSP39728.2021.9413352

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Wijnings, PWA , Stuijk, S, Scholte, R & Corporaal, H 2021, Characterization of MEMS microphone sensitivity and phase distributions with applications in array processing. in 2021 IEEE International Conference on Acoustics, Speech, and Signal Processing, ICASSP 2021 - Proceedings., 9413352, Institute of Electrical and Electronics Engineers, pp. 4480-4484, 2021 IEEE International Conference on Acoustics, Speech, and Signal Processing, ICASSP 2021, Virtual, Toronto, Canada, 6/06/21. https://doi.org/10.1109/ICASSP39728.2021.9413352

Characterization of MEMS microphone sensitivity and phase distributions with applications in array processing. / Wijnings, Patrick W.A.; Stuijk, Sander; Scholte, Rick et al.
2021 IEEE International Conference on Acoustics, Speech, and Signal Processing, ICASSP 2021 - Proceedings. Institute of Electrical and Electronics Engineers, 2021. p. 4480-4484 9413352.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Scholte, Rick

AU - Corporaal, Henk

PY - 2021/6/6

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N2 - An array with MEMS microphones can distinguish individual noise sources in an environment through spatial filtering. Its effectiveness depends on the variations in microphone sensitivity and phase. Quantification of these variations is valuable, because it enables assessment and optimization of array performance. This is particularly important if the measurements are to be used for enforcement of noise regulations.Nominal microphone sensitivity and phase are manufacturer-specified, but the distribution (histogram) around these values is not. Hence, this work demonstrates a free-field comparison method for measuring these variations in a batch of arrays. We also provide the histograms at 1 kHz for a sample population of 8384 Knowles SPH0641LM4H-1 MEMS microphones (131 arrays of 64 microphones). The histograms follow t-distributions, resulting in 95% confidence intervals of ±0.39dB for sensitivity and ±0.82◦ for phase. Finally, we illustrate that delay-and-sum beamforming with these microphones results in a Gumbel-distributed gain with −0.13/+0.10dB 95% confidence interval.

AB - An array with MEMS microphones can distinguish individual noise sources in an environment through spatial filtering. Its effectiveness depends on the variations in microphone sensitivity and phase. Quantification of these variations is valuable, because it enables assessment and optimization of array performance. This is particularly important if the measurements are to be used for enforcement of noise regulations.Nominal microphone sensitivity and phase are manufacturer-specified, but the distribution (histogram) around these values is not. Hence, this work demonstrates a free-field comparison method for measuring these variations in a batch of arrays. We also provide the histograms at 1 kHz for a sample population of 8384 Knowles SPH0641LM4H-1 MEMS microphones (131 arrays of 64 microphones). The histograms follow t-distributions, resulting in 95% confidence intervals of ±0.39dB for sensitivity and ±0.82◦ for phase. Finally, we illustrate that delay-and-sum beamforming with these microphones results in a Gumbel-distributed gain with −0.13/+0.10dB 95% confidence interval.

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ER -

Wijnings PWA , Stuijk S, Scholte R, Corporaal H. Characterization of MEMS microphone sensitivity and phase distributions with applications in array processing. In 2021 IEEE International Conference on Acoustics, Speech, and Signal Processing, ICASSP 2021 - Proceedings. Institute of Electrical and Electronics Engineers. 2021. p. 4480-4484. 9413352 doi: 10.1109/ICASSP39728.2021.9413352

Characterization of MEMS microphone sensitivity and phase distributions with applications in array processing

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