Abstract
A tactile probe has been designed at the Eindhoven University of Technology to measure a translation of its tip with a 3D uncertainty of 20 nm or better. The suspension of this probe and the electrical connections are manufactured in a series of etching and deposition steps and can be considered to be a Micro Electro-Mechanical System (MEMS). It will be shown that hysteresis effects can have a dominant influence on the probe measurement uncertainty. Several sources of hysteresis within the probe system are investigated experimentally.
Original language | English |
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Title of host publication | EUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology |
Editors | F. Chevrier |
Pages | 349-352 |
Number of pages | 4 |
Publication status | Published - 1 Jan 2005 |
Event | 5th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2005) - Montpellier, France Duration: 8 May 2005 → 11 May 2005 Conference number: 5 |
Conference
Conference | 5th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2005) |
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Abbreviated title | EUSPEN 2005 |
Country/Territory | France |
City | Montpellier |
Period | 8/05/05 → 11/05/05 |