Characterization of measurement effects in an MST based nano probe

E.J.C. Bos, F.L.M. Delbressine, A.M. Dietzel

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
4 Downloads (Pure)

Abstract

A tactile probe has been designed at the Eindhoven University of Technology to measure a translation of its tip with a 3D uncertainty of 20 nm or better. The suspension of this probe and the electrical connections are manufactured in a series of etching and deposition steps and can be considered to be a Micro Electro-Mechanical System (MEMS). It will be shown that hysteresis effects can have a dominant influence on the probe measurement uncertainty. Several sources of hysteresis within the probe system are investigated experimentally.

Original languageEnglish
Title of host publicationEUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology
EditorsF. Chevrier
Pages349-352
Number of pages4
Publication statusPublished - 1 Jan 2005
Event5th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2005) - Montpellier, France
Duration: 8 May 200511 May 2005
Conference number: 5

Conference

Conference5th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2005)
Abbreviated titleEUSPEN 2005
CountryFrance
CityMontpellier
Period8/05/0511/05/05

Fingerprint

Dive into the research topics of 'Characterization of measurement effects in an MST based nano probe'. Together they form a unique fingerprint.

Cite this