Characterization of measurement effects in an MST based nano probe

E.J.C. Bos; F.L.M. Delbressine; A.M. Dietzel

Characterization of measurement effects in an MST based nano probe

E.J.C. Bos, F.L.M. Delbressine, A.M. Dietzel

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

3 Citations (Scopus)

6 Downloads (Pure)

Abstract

A tactile probe has been designed at the Eindhoven University of Technology to measure a translation of its tip with a 3D uncertainty of 20 nm or better. The suspension of this probe and the electrical connections are manufactured in a series of etching and deposition steps and can be considered to be a Micro Electro-Mechanical System (MEMS). It will be shown that hysteresis effects can have a dominant influence on the probe measurement uncertainty. Several sources of hysteresis within the probe system are investigated experimentally.

Original language	English
Title of host publication	EUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology
Editors	F. Chevrier
Pages	349-352
Number of pages	4
Publication status	Published - 1 Jan 2005
Event	5th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2005) - Montpellier, France Duration: 8 May 2005 → 11 May 2005 Conference number: 5

Conference

Conference	5th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2005)
Abbreviated title	EUSPEN 2005
Country/Territory	France
City	Montpellier
Period	8/05/05 → 11/05/05

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title = "Characterization of measurement effects in an MST based nano probe",

abstract = "A tactile probe has been designed at the Eindhoven University of Technology to measure a translation of its tip with a 3D uncertainty of 20 nm or better. The suspension of this probe and the electrical connections are manufactured in a series of etching and deposition steps and can be considered to be a Micro Electro-Mechanical System (MEMS). It will be shown that hysteresis effects can have a dominant influence on the probe measurement uncertainty. Several sources of hysteresis within the probe system are investigated experimentally.",

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booktitle = "EUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology",

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Bos, EJC, Delbressine, FLM & Dietzel, AM 2005, Characterization of measurement effects in an MST based nano probe. in F Chevrier (ed.), EUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology., S4P16, pp. 349-352, 5th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2005), Montpellier, France, 8/05/05.

Characterization of measurement effects in an MST based nano probe. / Bos, E.J.C.; Delbressine, F.L.M.; Dietzel, A.M.

EUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology. ed. / F. Chevrier. 2005. p. 349-352 S4P16.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Dietzel, A.M.

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N2 - A tactile probe has been designed at the Eindhoven University of Technology to measure a translation of its tip with a 3D uncertainty of 20 nm or better. The suspension of this probe and the electrical connections are manufactured in a series of etching and deposition steps and can be considered to be a Micro Electro-Mechanical System (MEMS). It will be shown that hysteresis effects can have a dominant influence on the probe measurement uncertainty. Several sources of hysteresis within the probe system are investigated experimentally.

AB - A tactile probe has been designed at the Eindhoven University of Technology to measure a translation of its tip with a 3D uncertainty of 20 nm or better. The suspension of this probe and the electrical connections are manufactured in a series of etching and deposition steps and can be considered to be a Micro Electro-Mechanical System (MEMS). It will be shown that hysteresis effects can have a dominant influence on the probe measurement uncertainty. Several sources of hysteresis within the probe system are investigated experimentally.

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EP - 352

BT - EUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology

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T2 - 5th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2005)

Y2 - 8 May 2005 through 11 May 2005

ER -

Characterization of measurement effects in an MST based nano probe

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