Characterization of debris emitted from a Sn-based DPP EUV-source

K. Gielissen; Y. Sidelnikov; V.Y. Banine; J.J.A.M. Mullen, van der

Characterization of debris emitted from a Sn-based DPP EUV-source

K. Gielissen, Y. Sidelnikov, V.Y. Banine, J.J.A.M. Mullen, van der

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	Abstract presented at the 6th International Symposium on Extreme Ultraviolet Lithography (2007 EUVL Symposium), 28-31 October, 2007, Sappora, Japan
Publication status	Published - 2007

Cite this

@inproceedings{4f7eb8eb44914032a27805c7bfe4477d,

title = "Characterization of debris emitted from a Sn-based DPP EUV-source",

author = "K. Gielissen and Y. Sidelnikov and V.Y. Banine and \{Mullen, van der\}, J.J.A.M.",

year = "2007",

language = "English",

booktitle = "Abstract presented at the 6th International Symposium on Extreme Ultraviolet Lithography (2007 EUVL Symposium), 28-31 October, 2007, Sappora, Japan",

}

Characterization of debris emitted from a Sn-based DPP EUV-source. / Gielissen, K.; Sidelnikov, Y.; Banine, V.Y. et al.
Abstract presented at the 6th International Symposium on Extreme Ultraviolet Lithography (2007 EUVL Symposium), 28-31 October, 2007, Sappora, Japan. 2007.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Characterization of debris emitted from a Sn-based DPP EUV-source

AU - Gielissen, K.

AU - Sidelnikov, Y.

AU - Banine, V.Y.

AU - Mullen, van der, J.J.A.M.

PY - 2007

Y1 - 2007

M3 - Conference contribution

BT - Abstract presented at the 6th International Symposium on Extreme Ultraviolet Lithography (2007 EUVL Symposium), 28-31 October, 2007, Sappora, Japan

ER -