Characterization method for mechanical properties of thin freestanding metal films for RF-MEMS

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Abstract

A method for the characterization of mechanical properties of freestanding thin metal film materials used in RF-MEMS is evaluated. Freestanding beam structures are manufactured from a sputtered layer of AlCu(1wt%) on top of a wafer using an industrialized RF-MEMS manufacturing process. The methods of examining microstructure and geometry are studied. It is shown that these methods are promising for extracting the desired information about the material. Simple bending experiments are carried out on micro-scale beams of varying length and thickness using an indenter device. Elastic material properties are extracted from the results, using finite element technology combined with elastic theory, removing the necessity of extensive finite element simulations. It is shown that the beam length and indenter positioning play a crucial role. The obtained results show agreement with expected values for longer beams, but no obvious relation with the film thickness is found within the experimental range addressed.
Original languageEnglish
Title of host publicationProceedings of EuroSimE 2006
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Pages24-30
ISBN (Print)1-4244-0275-1
Publication statusPublished - 2006

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metal films
microelectromechanical systems
mechanical properties
positioning
film thickness
manufacturing
wafers
microstructure
geometry
simulation

Cite this

Burg, V., Toonder, den, J. M. J., Dijken, van, A., Hoefnagels, J. P. M., & Geers, M. G. D. (2006). Characterization method for mechanical properties of thin freestanding metal films for RF-MEMS. In Proceedings of EuroSimE 2006 (pp. 24-30). Piscataway: Institute of Electrical and Electronics Engineers.
Burg, V. ; Toonder, den, J.M.J. ; Dijken, van, A. ; Hoefnagels, J.P.M. ; Geers, M.G.D. / Characterization method for mechanical properties of thin freestanding metal films for RF-MEMS. Proceedings of EuroSimE 2006. Piscataway : Institute of Electrical and Electronics Engineers, 2006. pp. 24-30
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title = "Characterization method for mechanical properties of thin freestanding metal films for RF-MEMS",
abstract = "A method for the characterization of mechanical properties of freestanding thin metal film materials used in RF-MEMS is evaluated. Freestanding beam structures are manufactured from a sputtered layer of AlCu(1wt{\%}) on top of a wafer using an industrialized RF-MEMS manufacturing process. The methods of examining microstructure and geometry are studied. It is shown that these methods are promising for extracting the desired information about the material. Simple bending experiments are carried out on micro-scale beams of varying length and thickness using an indenter device. Elastic material properties are extracted from the results, using finite element technology combined with elastic theory, removing the necessity of extensive finite element simulations. It is shown that the beam length and indenter positioning play a crucial role. The obtained results show agreement with expected values for longer beams, but no obvious relation with the film thickness is found within the experimental range addressed.",
author = "V. Burg and {Toonder, den}, J.M.J. and {Dijken, van}, A. and J.P.M. Hoefnagels and M.G.D. Geers",
year = "2006",
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isbn = "1-4244-0275-1",
pages = "24--30",
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Burg, V, Toonder, den, JMJ, Dijken, van, A, Hoefnagels, JPM & Geers, MGD 2006, Characterization method for mechanical properties of thin freestanding metal films for RF-MEMS. in Proceedings of EuroSimE 2006. Institute of Electrical and Electronics Engineers, Piscataway, pp. 24-30.

Characterization method for mechanical properties of thin freestanding metal films for RF-MEMS. / Burg, V.; Toonder, den, J.M.J.; Dijken, van, A.; Hoefnagels, J.P.M.; Geers, M.G.D.

Proceedings of EuroSimE 2006. Piscataway : Institute of Electrical and Electronics Engineers, 2006. p. 24-30.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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T1 - Characterization method for mechanical properties of thin freestanding metal films for RF-MEMS

AU - Burg, V.

AU - Toonder, den, J.M.J.

AU - Dijken, van, A.

AU - Hoefnagels, J.P.M.

AU - Geers, M.G.D.

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N2 - A method for the characterization of mechanical properties of freestanding thin metal film materials used in RF-MEMS is evaluated. Freestanding beam structures are manufactured from a sputtered layer of AlCu(1wt%) on top of a wafer using an industrialized RF-MEMS manufacturing process. The methods of examining microstructure and geometry are studied. It is shown that these methods are promising for extracting the desired information about the material. Simple bending experiments are carried out on micro-scale beams of varying length and thickness using an indenter device. Elastic material properties are extracted from the results, using finite element technology combined with elastic theory, removing the necessity of extensive finite element simulations. It is shown that the beam length and indenter positioning play a crucial role. The obtained results show agreement with expected values for longer beams, but no obvious relation with the film thickness is found within the experimental range addressed.

AB - A method for the characterization of mechanical properties of freestanding thin metal film materials used in RF-MEMS is evaluated. Freestanding beam structures are manufactured from a sputtered layer of AlCu(1wt%) on top of a wafer using an industrialized RF-MEMS manufacturing process. The methods of examining microstructure and geometry are studied. It is shown that these methods are promising for extracting the desired information about the material. Simple bending experiments are carried out on micro-scale beams of varying length and thickness using an indenter device. Elastic material properties are extracted from the results, using finite element technology combined with elastic theory, removing the necessity of extensive finite element simulations. It is shown that the beam length and indenter positioning play a crucial role. The obtained results show agreement with expected values for longer beams, but no obvious relation with the film thickness is found within the experimental range addressed.

M3 - Conference contribution

SN - 1-4244-0275-1

SP - 24

EP - 30

BT - Proceedings of EuroSimE 2006

PB - Institute of Electrical and Electronics Engineers

CY - Piscataway

ER -

Burg V, Toonder, den JMJ, Dijken, van A, Hoefnagels JPM, Geers MGD. Characterization method for mechanical properties of thin freestanding metal films for RF-MEMS. In Proceedings of EuroSimE 2006. Piscataway: Institute of Electrical and Electronics Engineers. 2006. p. 24-30