Original language | English |
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Title of host publication | AVS, American Vacuum Society : 43rd national symposium, Philapdelphia, October 14-18, 1996 : Abstracts |
Pages | 144 |
Publication status | Published - 1996 |
Characterisation of a high intensity hydrogen plasma for materials processing
G.J.H. Brussaard, G.J. Brinkman, P. Ven, van de, M.C.M. Sanden, van de, J.J.A.M. Mullen, van der, D.C. Schram
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
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