Characterisation of a high intensity hydrogen plasma for materials processing

G.J.H. Brussaard, G.J. Brinkman, P. Ven, van de, M.C.M. Sanden, van de, J.J.A.M. Mullen, van der, D.C. Schram

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Original language	English
Title of host publication	AVS, American Vacuum Society : 43rd national symposium, Philapdelphia, October 14-18, 1996 : Abstracts
Pages	144
Publication status	Published - 1996

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title = "Characterisation of a high intensity hydrogen plasma for materials processing",

author = "G.J.H. Brussaard and G.J. Brinkman and {Ven, van de}, P. and {Sanden, van de}, M.C.M. and {Mullen, van der}, J.J.A.M. and D.C. Schram",

year = "1996",

language = "English",

pages = "144",

booktitle = "AVS, American Vacuum Society : 43rd national symposium, Philapdelphia, October 14-18, 1996 : Abstracts",

}

TY - GEN

T1 - Characterisation of a high intensity hydrogen plasma for materials processing

AU - Brussaard, G.J.H.

AU - Brinkman, G.J.

AU - Ven, van de, P.

AU - Sanden, van de, M.C.M.

AU - Mullen, van der, J.J.A.M.

AU - Schram, D.C.

PY - 1996

Y1 - 1996

M3 - Conference contribution

SP - 144

BT - AVS, American Vacuum Society : 43rd national symposium, Philapdelphia, October 14-18, 1996 : Abstracts

ER -