Characterisation of a high intensity hydrogen plasma for materials processing

G.J.H. Brussaard, G.J. Brinkman, P. Ven, van de, M.C.M. Sanden, van de, J.J.A.M. Mullen, van der, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationAVS, American Vacuum Society : 43rd national symposium, Philapdelphia, October 14-18, 1996 : Abstracts
Publication statusPublished - 1996

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