CH spectroscopy for carbon chemical erosion analysis in high density low temperature hydrogen plasma

J. Westerhout, N.J. Lopes Cardozo, J. Rapp, G.J. Rooij, van

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Abstract

The CH A-X molecular band is measured upon seeding the hydrogen plasma in the linear plasma generator Pilot-PSI [electron temperatureT e =0.1–2.5 eV and electron density n e =(0.5–5)×10 20 m -3 ] with methane. Calculated inverse photon efficiencies for these conditions range from 3 up to >10 6 due to a steeply decreasing electron excitation cross section. The experiments contradict the calculations and show a constant effective inverse photon efficiency of ~100 for T e 5×10 20 m -3 and 0.1 eV
Original languageEnglish
Article number151501
Pages (from-to)151501-1/3
Number of pages3
JournalApplied Physics Letters
Volume95
DOIs
Publication statusPublished - 2009

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