CH spectroscopy for carbon chemical erosion analysis in high density low temperature hydrogen plasma

J. Westerhout; N.J. Lopes Cardozo; J. Rapp; G.J. Rooij, van

doi:10.1063/1.3238295

CH spectroscopy for carbon chemical erosion analysis in high density low temperature hydrogen plasma

J. Westerhout, N.J. Lopes Cardozo, J. Rapp, G.J. Rooij, van

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Abstract

The CH A-X molecular band is measured upon seeding the hydrogen plasma in the linear plasma generator Pilot-PSI [electron temperatureT e =0.1–2.5 eV and electron density n e =(0.5–5)×10 20 m -3 ] with methane. Calculated inverse photon efficiencies for these conditions range from 3 up to >10 6 due to a steeply decreasing electron excitation cross section. The experiments contradict the calculations and show a constant effective inverse photon efficiency of ~100 for T e 5×10 20 m -3 and 0.1 eV

Original language	English
Article number	151501
Pages (from-to)	151501-1/3
Number of pages	3
Journal	Applied Physics Letters
Volume	95
DOIs	https://doi.org/10.1063/1.3238295
Publication status	Published - 2009

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@article{fc3df943878f4f138a7405ff04e75889,

title = "CH spectroscopy for carbon chemical erosion analysis in high density low temperature hydrogen plasma",

abstract = "The CH A-X molecular band is measured upon seeding the hydrogen plasma in the linear plasma generator Pilot-PSI [electron temperatureT e =0.1–2.5 eV and electron density n e =(0.5–5)×10 20 m -3 ] with methane. Calculated inverse photon efficiencies for these conditions range from 3 up to >10 6 due to a steeply decreasing electron excitation cross section. The experiments contradict the calculations and show a constant effective inverse photon efficiency of ~100 for T e 5×10 20 m -3 and 0.1 eV",

author = "J. Westerhout and {Lopes Cardozo}, N.J. and J. Rapp and {Rooij, van}, G.J.",

year = "2009",

doi = "10.1063/1.3238295",

language = "English",

volume = "95",

pages = "151501--1/3",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

}

TY - JOUR

T1 - CH spectroscopy for carbon chemical erosion analysis in high density low temperature hydrogen plasma

AU - Westerhout, J.

AU - Lopes Cardozo, N.J.

AU - Rapp, J.

AU - Rooij, van, G.J.

PY - 2009

Y1 - 2009

N2 - The CH A-X molecular band is measured upon seeding the hydrogen plasma in the linear plasma generator Pilot-PSI [electron temperatureT e =0.1–2.5 eV and electron density n e =(0.5–5)×10 20 m -3 ] with methane. Calculated inverse photon efficiencies for these conditions range from 3 up to >10 6 due to a steeply decreasing electron excitation cross section. The experiments contradict the calculations and show a constant effective inverse photon efficiency of ~100 for T e 5×10 20 m -3 and 0.1 eV

AB - The CH A-X molecular band is measured upon seeding the hydrogen plasma in the linear plasma generator Pilot-PSI [electron temperatureT e =0.1–2.5 eV and electron density n e =(0.5–5)×10 20 m -3 ] with methane. Calculated inverse photon efficiencies for these conditions range from 3 up to >10 6 due to a steeply decreasing electron excitation cross section. The experiments contradict the calculations and show a constant effective inverse photon efficiency of ~100 for T e 5×10 20 m -3 and 0.1 eV

U2 - 10.1063/1.3238295

DO - 10.1063/1.3238295

M3 - Article

SN - 0003-6951

VL - 95

SP - 151501-1/3

JO - Applied Physics Letters

JF - Applied Physics Letters

M1 - 151501

ER -

CH spectroscopy for carbon chemical erosion analysis in high density low temperature hydrogen plasma

Abstract

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