Cavity ring down spectroscopy for the detection of hydrocarbon radicals during a-C:H deposition

K.G.Y. Letourneur, M.C.M. Sanden, van de, R.A.H. Engeln, M.G.H. Boogaarts, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationPresentation at the AVS, American Vacuum Society : 46th international symposium, Seattle, October 25-29, 1999 : virtual proceedings
Publication statusPublished - 1999
Event46th International Symposium American Vacuum Society - Seattle, United States
Duration: 25 Oct 199929 Oct 1999


Conference46th International Symposium American Vacuum Society
Abbreviated titleAVS 46
Country/TerritoryUnited States

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