@inproceedings{16829ac042b441dbb74889b35c420a7c,
title = "Cavity ring down spectroscopy for the detection of hydrocarbon radicals during a-C:H deposition",
author = "K.G.Y. Letourneur and {Sanden, van de}, M.C.M. and R.A.H. Engeln and M.G.H. Boogaarts and D.C. Schram",
year = "1999",
language = "English",
pages = "PS--TuA7--",
booktitle = "Presentation at the AVS, American Vacuum Society : 46th international symposium, Seattle, October 25-29, 1999 : virtual proceedings",
note = "46th International Symposium American Vacuum Society, AVS 46 ; Conference date: 25-10-1999 Through 29-10-1999",
}