Cavity ring down spectroscopy as a probe for radicals during a-C:H deposition

K.G.Y. Letourneur; M.C.M. Sanden, van de; M.G.H. Boogaarts; R.A.H. Engeln; D.C. Schram

Cavity ring down spectroscopy as a probe for radicals during a-C:H deposition

K.G.Y. Letourneur, M.C.M. Sanden, van de, M.G.H. Boogaarts, R.A.H. Engeln, D.C. Schram

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	Laser-aided plasma diagnostics : proceedings of the 9th International symposium, Lake Tahoe, California, 26 September - 1 October 1999Proceedings of the 9th international symposium on laser-aided plasma diagnostics : Lake Tahoe, California, USA, 26 September - 1 October 1999
Pages	211-216
Publication status	Published - 1999
Event	9th International Symposium on Laser-Aided Plasma Diagnostics (LAPD9), September 26-October 1, 1999, Lake Tahoe, CA, USA - Lake Tahoe, CA, United States Duration: 26 Sept 1999 → 1 Oct 1999

Conference

Conference	9th International Symposium on Laser-Aided Plasma Diagnostics (LAPD9), September 26-October 1, 1999, Lake Tahoe, CA, USA
Abbreviated title	LAPD9
Country/Territory	United States
City	Lake Tahoe, CA
Period	26/09/99 → 1/10/99

Cite this

Letourneur, K. G. Y., Sanden, van de, M. C. M., Boogaarts, M. G. H., Engeln, R. A. H., & Schram, D. C. (1999). Cavity ring down spectroscopy as a probe for radicals during a-C:H deposition. In Laser-aided plasma diagnostics : proceedings of the 9th International symposium, Lake Tahoe, California, 26 September - 1 October 1999Proceedings of the 9th international symposium on laser-aided plasma diagnostics : Lake Tahoe, California, USA, 26 September - 1 October 1999 (pp. 211-216)

Letourneur, K.G.Y. ; Sanden, van de, M.C.M. ; Boogaarts, M.G.H. et al. / Cavity ring down spectroscopy as a probe for radicals during a-C:H deposition. Laser-aided plasma diagnostics : proceedings of the 9th International symposium, Lake Tahoe, California, 26 September - 1 October 1999Proceedings of the 9th international symposium on laser-aided plasma diagnostics : Lake Tahoe, California, USA, 26 September - 1 October 1999. 1999. pp. 211-216

@inproceedings{d297ef558e504ac0959938fdf629e3ee,

title = "Cavity ring down spectroscopy as a probe for radicals during a-C:H deposition",

author = "K.G.Y. Letourneur and {Sanden, van de}, M.C.M. and M.G.H. Boogaarts and R.A.H. Engeln and D.C. Schram",

year = "1999",

language = "English",

pages = "211--216",

booktitle = "Laser-aided plasma diagnostics : proceedings of the 9th International symposium, Lake Tahoe, California, 26 September - 1 October 1999Proceedings of the 9th international symposium on laser-aided plasma diagnostics : Lake Tahoe, California, USA, 26 September - 1 October 1999",

note = "9th International Symposium on Laser-Aided Plasma Diagnostics (LAPD9), September 26-October 1, 1999, Lake Tahoe, CA, USA, LAPD9 ; Conference date: 26-09-1999 Through 01-10-1999",

}

Letourneur, KGY, Sanden, van de, MCM, Boogaarts, MGH, Engeln, RAH & Schram, DC 1999, Cavity ring down spectroscopy as a probe for radicals during a-C:H deposition. in Laser-aided plasma diagnostics : proceedings of the 9th International symposium, Lake Tahoe, California, 26 September - 1 October 1999Proceedings of the 9th international symposium on laser-aided plasma diagnostics : Lake Tahoe, California, USA, 26 September - 1 October 1999. pp. 211-216, 9th International Symposium on Laser-Aided Plasma Diagnostics (LAPD9), September 26-October 1, 1999, Lake Tahoe, CA, USA, Lake Tahoe, CA, United States, 26/09/99.

Cavity ring down spectroscopy as a probe for radicals during a-C:H deposition. / Letourneur, K.G.Y.; Sanden, van de, M.C.M.; Boogaarts, M.G.H. et al.
Laser-aided plasma diagnostics : proceedings of the 9th International symposium, Lake Tahoe, California, 26 September - 1 October 1999Proceedings of the 9th international symposium on laser-aided plasma diagnostics : Lake Tahoe, California, USA, 26 September - 1 October 1999. 1999. p. 211-216.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Cavity ring down spectroscopy as a probe for radicals during a-C:H deposition

AU - Letourneur, K.G.Y.

AU - Sanden, van de, M.C.M.

AU - Boogaarts, M.G.H.

AU - Engeln, R.A.H.

AU - Schram, D.C.

PY - 1999

Y1 - 1999

M3 - Conference contribution

SP - 211

EP - 216

BT - Laser-aided plasma diagnostics : proceedings of the 9th International symposium, Lake Tahoe, California, 26 September - 1 October 1999Proceedings of the 9th international symposium on laser-aided plasma diagnostics : Lake Tahoe, California, USA, 26 September - 1 October 1999

T2 - 9th International Symposium on Laser-Aided Plasma Diagnostics (LAPD9), September 26-October 1, 1999, Lake Tahoe, CA, USA

Y2 - 26 September 1999 through 1 October 1999

ER -

Letourneur KGY, Sanden, van de MCM, Boogaarts MGH, Engeln RAH , Schram DC. Cavity ring down spectroscopy as a probe for radicals during a-C:H deposition. In Laser-aided plasma diagnostics : proceedings of the 9th International symposium, Lake Tahoe, California, 26 September - 1 October 1999Proceedings of the 9th international symposium on laser-aided plasma diagnostics : Lake Tahoe, California, USA, 26 September - 1 October 1999. 1999. p. 211-216