Cavity ring down spectroscopy as a probe for radicals during a-C:H deposition

K.G.Y. Letourneur, M.C.M. Sanden, van de, M.G.H. Boogaarts, R.A.H. Engeln, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationLaser-aided plasma diagnostics : proceedings of the 9th International symposium, Lake Tahoe, California, 26 September - 1 October 1999Proceedings of the 9th international symposium on laser-aided plasma diagnostics : Lake Tahoe, California, USA, 26 September - 1 October 1999
Pages211-216
Publication statusPublished - 1999
Event9th International Symposium on Laser-Aided Plasma Diagnostics (LAPD9), September 26-October 1, 1999, Lake Tahoe, CA, USA - Lake Tahoe, CA, United States
Duration: 26 Sep 19991 Oct 1999

Conference

Conference9th International Symposium on Laser-Aided Plasma Diagnostics (LAPD9), September 26-October 1, 1999, Lake Tahoe, CA, USA
Abbreviated titleLAPD9
Country/TerritoryUnited States
CityLake Tahoe, CA
Period26/09/991/10/99

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