Cavity ring down spectroscopy as a probe for hydrocarbon radicals during a-C:H depositions

K.G.Y. Letourneur, M.G.H. Boogaarts, M.C.M. Sanden, van de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	European Material Conference, Strasbourg, June 1-4, 1999, Book of Abstracts
Pages	D5-
Publication status	Published - 1999

Cite this

@inproceedings{636d5b566d014ed7b68e137d55efb8e9,

title = "Cavity ring down spectroscopy as a probe for hydrocarbon radicals during a-C:H depositions",

author = "K.G.Y. Letourneur and M.G.H. Boogaarts and {Sanden, van de}, M.C.M. and D.C. Schram",

year = "1999",

language = "English",

pages = "D5--",

booktitle = "European Material Conference, Strasbourg, June 1-4, 1999, Book of Abstracts",

}