Cavity ring down spectroscopy as a probe for hydrocarbon radicals during a-C:H depositions

K.G.Y. Letourneur, M.G.H. Boogaarts, M.C.M. Sanden, van de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationEuropean Material Conference, Strasbourg, June 1-4, 1999, Book of Abstracts
PagesD5-
Publication statusPublished - 1999

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