Original language | English |
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Title of host publication | European Material Conference, Strasbourg, June 1-4, 1999, Book of Abstracts |
Pages | D5- |
Publication status | Published - 1999 |
Cavity ring down spectroscopy as a probe for hydrocarbon radicals during a-C:H depositions
K.G.Y. Letourneur, M.G.H. Boogaarts, M.C.M. Sanden, van de, D.C. Schram
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic