Cavity ring down detection of CH3 and SiH3 in an expanding cascaded arc plasma

M.G.H. Boogaarts; P.J. Bocker; W.M.M. Kessels; M.C.M. Sanden, van de; D.C. Schram

Cavity ring down detection of CH3 and SiH3 in an expanding cascaded arc plasma

M.G.H. Boogaarts
, P.J. Bocker
, W.M.M. Kessels
, M.C.M. Sanden, van de
, D.C. Schram

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

3 Downloads (Pure)

Original language	English
Title of host publication	Najaarsvergadering van de sectie Atoomfysica en Quantumelectronica van de Nederlandse Natuurkundige Vereniging, Lunteren, 11 en 12 november 1999, programma en abstracts
Pages	P9
Publication status	Published - 1999

Cite this

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title = "Cavity ring down detection of CH3 and SiH3 in an expanding cascaded arc plasma",

author = "M.G.H. Boogaarts and P.J. Bocker and W.M.M. Kessels and \{Sanden, van de\}, M.C.M. and D.C. Schram",

year = "1999",

language = "English",

pages = "P9",

booktitle = "Najaarsvergadering van de sectie Atoomfysica en Quantumelectronica van de Nederlandse Natuurkundige Vereniging, Lunteren, 11 en 12 november 1999, programma en abstracts",

}

Cavity ring down detection of CH3 and SiH3 in an expanding cascaded arc plasma. / Boogaarts, M.G.H.; Bocker, P.J.; Kessels, W.M.M. et al.
Najaarsvergadering van de sectie Atoomfysica en Quantumelectronica van de Nederlandse Natuurkundige Vereniging, Lunteren, 11 en 12 november 1999, programma en abstracts. 1999. p. P9.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Cavity ring down detection of CH3 and SiH3 in an expanding cascaded arc plasma

AU - Boogaarts, M.G.H.

AU - Bocker, P.J.

AU - Kessels, W.M.M.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1999

Y1 - 1999

M3 - Conference contribution

SP - P9

BT - Najaarsvergadering van de sectie Atoomfysica en Quantumelectronica van de Nederlandse Natuurkundige Vereniging, Lunteren, 11 en 12 november 1999, programma en abstracts

ER -