Cavity Ring Down detection of CH3 and SiH3 in an expanding cascaded arc plasma

M.G.H. Boogaarts; P.J. Bocker; W.M.M. Kessels; M.C.M. Sanden, van de; D.C. Schram

Cavity Ring Down detection of CH3 and SiH3 in an expanding cascaded arc plasma

M.G.H. Boogaarts, P.J. Bocker, W.M.M. Kessels, M.C.M. Sanden, van de, D.C. Schram

Plasma & Materials Processing

Research output: Contribution to conference › Poster

1 Downloads (Pure)

Original language	English
Pages	P31-
Publication status	Published - 1999
Event	2nd Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-2), December 2-3, 1999, Kerkrade, The Netherlands - Conference centre "Rolduc", Kerkrade, Netherlands Duration: 2 Dec 1999 → 3 Dec 1999

Workshop

Workshop	2nd Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-2), December 2-3, 1999, Kerkrade, The Netherlands
Abbreviated title	WELTPP-2
Country/Territory	Netherlands
City	Kerkrade
Period	2/12/99 → 3/12/99

Bibliographical note

Poster presented at the 2nd Euregional WELT-PP Workshop on the Exploration of Low Temperature Plasma Physics, December 2-3, 1999, Rolduc, Kerkrade, The Netherlands

Cite this

Boogaarts, M. G. H., Bocker, P. J., Kessels, W. M. M., Sanden, van de, M. C. M., & Schram, D. C. (1999). Cavity Ring Down detection of CH3 and SiH3 in an expanding cascaded arc plasma. P31-. Poster session presented at 2nd Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-2), December 2-3, 1999, Kerkrade, The Netherlands, Kerkrade, Netherlands.

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title = "Cavity Ring Down detection of CH3 and SiH3 in an expanding cascaded arc plasma",

author = "M.G.H. Boogaarts and P.J. Bocker and W.M.M. Kessels and {Sanden, van de}, M.C.M. and D.C. Schram",

note = "Poster presented at the 2nd Euregional WELT-PP Workshop on the Exploration of Low Temperature Plasma Physics, December 2-3, 1999, Rolduc, Kerkrade, The Netherlands; 2nd Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-2), December 2-3, 1999, Kerkrade, The Netherlands, WELTPP-2 ; Conference date: 02-12-1999 Through 03-12-1999",

year = "1999",

language = "English",

pages = "P31--",

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Cavity Ring Down detection of CH3 and SiH3 in an expanding cascaded arc plasma. / Boogaarts, M.G.H.; Bocker, P.J.; Kessels, W.M.M. et al.
1999. P31- Poster session presented at 2nd Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-2), December 2-3, 1999, Kerkrade, The Netherlands, Kerkrade, Netherlands.

Research output: Contribution to conference › Poster

TY - CONF

T1 - Cavity Ring Down detection of CH3 and SiH3 in an expanding cascaded arc plasma

AU - Boogaarts, M.G.H.

AU - Bocker, P.J.

AU - Kessels, W.M.M.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

N1 - Poster presented at the 2nd Euregional WELT-PP Workshop on the Exploration of Low Temperature Plasma Physics, December 2-3, 1999, Rolduc, Kerkrade, The Netherlands

PY - 1999

Y1 - 1999

M3 - Poster

SP - P31-

T2 - 2nd Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-2), December 2-3, 1999, Kerkrade, The Netherlands

Y2 - 2 December 1999 through 3 December 1999

ER -