Cavity ring down absorption spectroscopy : a versatile diagnostic for studies of plasma and surface chemistry processes in deposition plasmas

M.C.M. van de Sanden; J. Benedikt; M.G.H. Boogaarts; R.A.H. Engeln; J.P.M. Hoefnagels; W.M.M. Kessels; K.G.Y. Letourneur; D.C. Schram; A.H.M. Smets

Cavity ring down absorption spectroscopy : a versatile diagnostic for studies of plasma and surface chemistry processes in deposition plasmas

M.C.M. van de Sanden
, J. Benedikt
, M.G.H. Boogaarts
, R.A.H. Engeln
, J.P.M. Hoefnagels
, W.M.M. Kessels
, K.G.Y. Letourneur
, D.C. Schram
, A.H.M. Smets

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	CIP'2001 proceedings : 13th International colloquium on plasma processes, June 10-14, 2001, Antibes - Juan-les-Pins, France
Place of Publication	Paris
Publisher	Société Française du Vide
Pages	43-48
Publication status	Published - 2001
Event	13th International Colloquium on Plasma Processes (CIP 2001) - Antibes, France Duration: 10 Jun 2001 → 14 Jun 2001

Publication series

Name	Le vide
Number	Numero special
Volume	(2001)
ISSN (Print)	1266-0167

Conference

Conference	13th International Colloquium on Plasma Processes (CIP 2001)
Abbreviated title	CIP'2001
Country/Territory	France
City	Antibes
Period	10/06/01 → 14/06/01

Cite this

van de Sanden, M. C. M., Benedikt, J., Boogaarts, M. G. H., Engeln, R. A. H., Hoefnagels, J. P. M., Kessels, W. M. M., Letourneur, K. G. Y., Schram, D. C., & Smets, A. H. M. (2001). Cavity ring down absorption spectroscopy : a versatile diagnostic for studies of plasma and surface chemistry processes in deposition plasmas. In CIP'2001 proceedings : 13th International colloquium on plasma processes, June 10-14, 2001, Antibes - Juan-les-Pins, France (pp. 43-48). (Le vide; Vol. (2001), No. Numero special). Société Française du Vide.

van de Sanden, M.C.M. ; Benedikt, J. ; Boogaarts, M.G.H. et al. / Cavity ring down absorption spectroscopy : a versatile diagnostic for studies of plasma and surface chemistry processes in deposition plasmas. CIP'2001 proceedings : 13th International colloquium on plasma processes, June 10-14, 2001, Antibes - Juan-les-Pins, France. Paris : Société Française du Vide, 2001. pp. 43-48 (Le vide; Numero special).

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title = "Cavity ring down absorption spectroscopy : a versatile diagnostic for studies of plasma and surface chemistry processes in deposition plasmas",

author = "\{van de Sanden\}, M.C.M. and J. Benedikt and M.G.H. Boogaarts and R.A.H. Engeln and J.P.M. Hoefnagels and W.M.M. Kessels and K.G.Y. Letourneur and D.C. Schram and A.H.M. Smets",

year = "2001",

language = "English",

series = "Le vide",

publisher = "Soci{\'e}t{\'e} Fran{\c c}aise du Vide",

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pages = "43--48",

booktitle = "CIP'2001 proceedings : 13th International colloquium on plasma processes, June 10-14, 2001, Antibes - Juan-les-Pins, France",

address = "France",

note = "13th International Colloquium on Plasma Processes (CIP 2001), CIP'2001 ; Conference date: 10-06-2001 Through 14-06-2001",

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van de Sanden, MCM, Benedikt, J, Boogaarts, MGH, Engeln, RAH , Hoefnagels, JPM , Kessels, WMM, Letourneur, KGY, Schram, DC & Smets, AHM 2001, Cavity ring down absorption spectroscopy : a versatile diagnostic for studies of plasma and surface chemistry processes in deposition plasmas. in CIP'2001 proceedings : 13th International colloquium on plasma processes, June 10-14, 2001, Antibes - Juan-les-Pins, France. Le vide, no. Numero special, vol. (2001), Société Française du Vide, Paris, pp. 43-48, 13th International Colloquium on Plasma Processes (CIP 2001), Antibes, France, 10/06/01.

Cavity ring down absorption spectroscopy : a versatile diagnostic for studies of plasma and surface chemistry processes in deposition plasmas. / van de Sanden, M.C.M.; Benedikt, J.; Boogaarts, M.G.H. et al.
CIP'2001 proceedings : 13th International colloquium on plasma processes, June 10-14, 2001, Antibes - Juan-les-Pins, France. Paris: Société Française du Vide, 2001. p. 43-48 (Le vide; Vol. (2001), No. Numero special).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Cavity ring down absorption spectroscopy : a versatile diagnostic for studies of plasma and surface chemistry processes in deposition plasmas

AU - van de Sanden, M.C.M.

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AU - Boogaarts, M.G.H.

AU - Engeln, R.A.H.

AU - Hoefnagels, J.P.M.

AU - Kessels, W.M.M.

AU - Letourneur, K.G.Y.

AU - Schram, D.C.

AU - Smets, A.H.M.

PY - 2001

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M3 - Conference contribution

T3 - Le vide

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BT - CIP'2001 proceedings : 13th International colloquium on plasma processes, June 10-14, 2001, Antibes - Juan-les-Pins, France

PB - Société Française du Vide

CY - Paris

T2 - 13th International Colloquium on Plasma Processes (CIP 2001)

Y2 - 10 June 2001 through 14 June 2001

ER -

van de Sanden MCM, Benedikt J, Boogaarts MGH, Engeln RAH , Hoefnagels JPM , Kessels WMM et al. Cavity ring down absorption spectroscopy : a versatile diagnostic for studies of plasma and surface chemistry processes in deposition plasmas. In CIP'2001 proceedings : 13th International colloquium on plasma processes, June 10-14, 2001, Antibes - Juan-les-Pins, France. Paris: Société Française du Vide. 2001. p. 43-48. (Le vide; Numero special).