Cavity ring down absorption spectroscopy : a versatile diagnostic for studies of plasma and surface chemistry processes in deposition plasmas

M.C.M. van de Sanden, J. Benedikt, M.G.H. Boogaarts, R.A.H. Engeln, J.P.M. Hoefnagels, W.M.M. Kessels, K.G.Y. Letourneur, D.C. Schram, A.H.M. Smets

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationCIP'2001 proceedings : 13th International colloquium on plasma processes, June 10-14, 2001, Antibes - Juan-les-Pins, France
Place of PublicationParis
PublisherSociété Française du Vide
Pages43-48
Publication statusPublished - 2001
Event13th International Colloquium on Plasma Processes (CIP 2001) - Antibes, France
Duration: 10 Jun 200114 Jun 2001

Publication series

NameLe vide
NumberNumero special
Volume(2001)
ISSN (Print)1266-0167

Conference

Conference13th International Colloquium on Plasma Processes (CIP 2001)
Abbreviated titleCIP'2001
CountryFrance
CityAntibes
Period10/06/0114/06/01

Cite this

van de Sanden, M. C. M., Benedikt, J., Boogaarts, M. G. H., Engeln, R. A. H., Hoefnagels, J. P. M., Kessels, W. M. M., Letourneur, K. G. Y., Schram, D. C., & Smets, A. H. M. (2001). Cavity ring down absorption spectroscopy : a versatile diagnostic for studies of plasma and surface chemistry processes in deposition plasmas. In CIP'2001 proceedings : 13th International colloquium on plasma processes, June 10-14, 2001, Antibes - Juan-les-Pins, France (pp. 43-48). (Le vide; Vol. (2001), No. Numero special). Société Française du Vide.