Abstract
Graphene metrology needs to keep up with the fast pace of developments in graphene growth and transfer. Terahertz time-domain spectroscopy (THz-TDS) is a non-contact, fast, and non-destructive characterization technique for mapping the electrical properties of graphene. Here we show several case studies of graphene characterization on a range of different substrates that highlight the versatility of THz-TDS measurements and its relevance for process optimization in graphene production scenarios.
| Original language | English |
|---|---|
| Article number | 022003 |
| Journal | 2D Materials |
| Volume | 8 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 17 Feb 2021 |
| Externally published | Yes |
Bibliographical note
Publisher Copyright:© 2021 The Author(s). Published by IOP Publishing Ltd.
Keywords
- CVD grapheme
- electrical mapping
- large-scale grapheme
- terahertz spectroscopy
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