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Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy

  • Patrick R. Whelan
  • , Binbin Zhou
  • , Odile Bezencenet
  • , Abhay Shivayogimath
  • , Neeraj Mishra
  • , Qian Shen
  • , Bjarke S. Jessen
  • , Iwona Pasternak
  • , David M.A. Mackenzie
  • , Jie Ji
  • , Cunzhi Sun
  • , Pierre Seneor
  • , Bruno Dlubak
  • , Birong Luo
  • , Frederik W. Østerberg
  • , Deping Huang
  • , Haofei Shi
  • , Da Luo
  • , Meihui Wang
  • , Rodney S. Ruoff
  • Ben R. Conran, Clifford McAleese, Cedric Huyghebaert, Steven Brems, Timothy J. Booth, Ilargi Napal, Wlodek Strupinski, Dirch H. Petersen, Stiven Forti, Camilla Coletti, Alexandre Jouvray, Kenneth B.K. Teo, Alba Centeno, Amaia Zurutuza, Pierre Legagneux, Peter U. Jepsen, Peter Bøggild

Research output: Contribution to journalReview articlepeer-review

Abstract

Graphene metrology needs to keep up with the fast pace of developments in graphene growth and transfer. Terahertz time-domain spectroscopy (THz-TDS) is a non-contact, fast, and non-destructive characterization technique for mapping the electrical properties of graphene. Here we show several case studies of graphene characterization on a range of different substrates that highlight the versatility of THz-TDS measurements and its relevance for process optimization in graphene production scenarios.

Original languageEnglish
Article number022003
Journal2D Materials
Volume8
Issue number2
DOIs
Publication statusPublished - 17 Feb 2021
Externally publishedYes

Bibliographical note

Publisher Copyright:
© 2021 The Author(s). Published by IOP Publishing Ltd.

Keywords

  • CVD grapheme
  • electrical mapping
  • large-scale grapheme
  • terahertz spectroscopy

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